Bulk acoustic resonator
AssigneeSamsung Electro-Mechanics Co., Ltd.
InventorsTae Kyung Lee, Hwa Sun Lee, Hyun Min Hwang, Moon Chul Lee, Sung Sun Kim, Tae Yoon Kim
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Abstract
A bulk acoustic resonator may include a substrate; a resonating portion including a first electrode layer, a piezoelectric layer, and a second electrode layer which are sequentially stacked on the substrate, and partitioned into an active region and a non-active region; and a frame electrode layer including frame electrodes disposed within the active region to be spaced apart from each other along an outer circumference portion of the active region.
Claims20
A bulk acoustic resonator, comprising:
- a resonating portion comprising a first electrode layer, a piezoelectric layer, and a second electrode layer sequentially stacked on a substrate, wherein the substrate comprises an active region and a non-active region;
- and
- a frame electrode layer comprising frame electrodes disposed within the active region to be spaced apart from each other along an outer circumference portion of the active region,
- wherein a ratio of a length of each of the frame electrodes to a length of each of the divided portions is 20% to 200%.
A bulk acoustic resonator comprising:
- a resonating portion comprising a first electrode layer, a piezoelectric layer, and a second electrode layer sequentially stacked on a substrate, wherein the substrate is partitioned into an active region and a non-active region;
- and
- a frame electrode layer comprising convex portions and concave portions alternately and respectively formed within the active region, along an outer circumference portion of the active region.
A bulk acoustic resonator, comprising:
- a piezoelectric layer disposed on a substrate having an active region and a non-active region, wherein the piezoelectric layer is disposed between a first electrode layer and a second electrode layer;
- and
- a frame electrode layer disposed on the second electrode in the active region, the frame electrode layer comprising an annular arrangement of spaced protrusions,
- wherein the frame electrode layer is disposed directly on a flat portion of the second electrode.
Dependencies are inferred from the claim text.