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US 10,541,668 B2Granted
Acoustic resonator and method of manufacturing the same
AssigneeSamsung Electro-Mechanics Co., Ltd.
InventorsRan Hee Shin, Tae Kyung Lee, Sung Han, Yun Sung Kang, Sung Sun Kim, Jin Suk Son, Jeong Suong Yang, Hwa Sun Lee, Eun Tae Park
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Abstract
An acoustic resonator and a method of manufacturing the same are provided. The acoustic resonator includes a resonating part including a first electrode, a second electrode, and a piezoelectric layer; and a plurality of seed layers disposed on one side of the resonating part.
Claims17
An acoustic resonator comprising:
- a resonating part comprising a first electrode, a second electrode, and a piezoelectric layer disposed between the first electrode and the second electrode;
- and
- a plurality of seed layers disposed on one side of the resonating part,
- wherein the plurality of seed layers comprise a first seed layer and a second seed layer,
- wherein an upper surface of the second seed layer corresponds to a (002) plane of hexagonal lattice.
2 more elements
An acoustic resonator comprising:
- a resonating part comprising a first electrode, a second electrode, and a piezoelectric layer disposed between the first electrode and the second electrode;
- and
- a plurality of seed layers disposed on one side of the resonating part,
- wherein a first seed layer and a second seed layer of the plurality of seed layers, and the piezoelectric layer each comprise a material having a hexagonal crystal system.
1 more element
An acoustic resonator comprising:
- a resonating part comprising a first electrode, a second electrode, and a piezoelectric layer disposed between the first electrode and the second electrode;
- a plurality of seed layers disposed on one side of the resonating part, comprising a first seed layer and a second seed layer;
- a substrate disposed on the opposite side of the plurality of seed layers from the resonating part;
- and
- a plurality of membrane layers interposed between the substrate and the plurality of seed layers,
- wherein a lattice mismatch between the first seed layer and the second seed layer is less than or equal to 12.45%.
3 more elements
Dependencies are inferred from the claim text.