Method of producing high purity SiOx nanoparticles with excellent volatility and apparatus for producing the same

A method of producing SiOx nanoparticles, comprising:

• charging raw silicon into a graphite crucible;
• performing induction heating melting of the charged raw silicon in the graphite crucible to form molten silicon having an increased surface area, wherein the molten silicon is stirred by an electromagnetic field and the molten silicon has a portion which is separated from a sidewall of the graphite crucible and risen up at the center of the graphite crucible;
• injecting a gas into the graphite crucible via an injection nozzle disposed above the molten silicon, wherein injecting the gas comprises bringing the gas into direct contact with a top surface of the molten silicon;
• allowing the molten silicon to react with the injected gas to produce SiOx vapor;
• and
• collecting SiOx nanoparticles by cooling and condensing a portion of the SiOx vapor inflowed into a gas phase flow section disposed above the graphite crucible and the injection nozzle,
• wherein the injected gas comprises O2 and Ar,
• wherein the graphite crucible is divided into segments by a plurality of slits,
• wherein the collecting of the SiOx nanoparticles comprises injecting a coating gas to the SiOx nanoparticles,
• wherein the coating gas is selected from CH4, C2H6, C3H8, C4H10, C5H12, C6H14, or a mixture thereof,
• wherein the SiOx nanoparticles are subjected to carbon coating by the coating gas simultaneously with manufacture of the SiOx nanoparticles,
• wherein the SiOx vapor is transferred by pressure difference created by adjusting pressures of the gas phase flow section and a collecting section to be different from each other,
• wherein a gas circulation section circulates the SiOx vapor to allow the SiOx vapor that is not cooled and condensed to return from the collecting section to the gas phase flow section.