Evaporation deposition equipment and evaporation deposition method

An evaporation deposition method, applicable to vapor-depositing an organic light-emitting layer on an array substrate with a formed anode layer, the evaporation deposition method comprising:

• S10:
• providing an evaporation deposition equipment, evaporation deposition equipment comprising:
• a first platform, disposed with an electrode plate;
• a second platform, disposed above the first platform, for carrying the array substrate;
• a vaporizing unit, disposed at the electrode plate;
• a mask carrier, for fixing a mask with opening pattern between the array substrate and the vaporizing unit;
• an electric field forming unit, electrically connected to the array substrate and the electrode plate, for forming an electric field between the anode layer and the electrode plate;
• S20:
• fixing the array substrate to the second platform;
• S30:
• fixing the mask with opening pattern to the mask carrier, disposed between the array substrate and the vaporizing unit;
• S40:
• controlling the vaporizing unit to generate charged vapor-depositing material particles and spray the charged vapor-depositing material particles towards the array substrate;
• S50:
• controlling the electric field forming unit to form an electric field between the anode layer and the electrode plate, the electric field guiding the charged vapor-depositing material particles towards the array substrate to deposit to form an organic light-emitting layer corresponding to the opening pattern of the mask;
• wherein the organic light-emitting layer comprises:
• a red organic light-emitting layer disposed on a first anode layer, a green organic light-emitting layer disposed on a second anode layer, and a blue organic light-emitting layer disposed on a third anode layer;
• wherein:
• when depositing the red organic light-emitting layer, the opening pattern of the mask faces the first anode layer, and the electric field unit forms the electric field only between the first anode layer and the electrode plate;
• when depositing the green organic light-emitting layer, the opening pattern of the mask faces the second anode layer, and the electric field unit forms the electric field only between the second anode layer and the electrode plate;
• when depositing the blue organic light-emitting layer, the opening pattern of the mask faces the third anode layer, and the electric field unit forms the electric field only between the third anode layer and the electrode plate.