Flexible TFT substrate having a plurality of grooves in organic material

A manufacturing method of flexible thin film transistor (TFT) substrate, which comprises:

• Step 1:
• providing a rigid substrate, coating a first organic material on the rigid substrate to form a flexible base;
• Step 2:
• coating a second organic material on the flexible base to form a first organic layer, performing patterning on the first organic layer with a halftone mask to form a plurality of first grooves, a plurality of second grooves, a plurality of third grooves and a plurality of fourth grooves:
• wherein the first grooves intersecting with the second grooves, the third grooves connected respectively to the first grooves and the second grooves, and the fourth grooves connected to the third grooves;
• Step 3:
• forming a scan line in each first groove, forming a gate in the third groove, the gate being connected to the scan line;
• forming a gate insulation layer on the scan line and the gate;
• forming an active layer on the gate insulation layer at location corresponding to above the gate;
• forming a data line in each second groove, forming a source and a drain in the third groove, the source connected to the data line, the source and the drain connected respectively to the two sides of the active layer;
• forming a passivation layer on the data line, the source, the drain, the active layer and bottom of the fourth groove, forming a first via on the passivation layer at location corresponding to above the drain;
• forming a pixel electrode on the passivation layer at location corresponding to above the bottom of the fourth groove, the pixel electrode contacting the drain through the first via;
• Step 4:
• coating a third organic material on the first organic layer to form a second organic layer;
• Step 5:
• peeling the flexible base from the rigid substrate to obtain a flexible TFT substrate;
• wherein the bottoms of the first groove, the second groove, the third groove and the fourth groove being located in the first organic layer or the interface between the flexible base and the first organic layer, the first groove, the second groove, the third groove and the fourth groove having the same or different depth;
• wherein Step 2 further comprising:
• forming a plurality of fifth grooves on the first organic layer, the fifth grooves being connected to none, one or more of the first groove, the second groove, the third groove and the fourth groove, the bottom of the fifth groove being located in the first organic layer or the interface between the flexible base and the first organic layer, and the fifth groove having the same with none, one or more of the first groove, the second groove, the third groove and the fourth groove.