Apparatus and methods for integrating magnetoresistive devices
AssigneeEverspin Technologies, Inc.
InventorsSarin A. Deshpande, Sanjeev Aggarwal, Moazzem Hossain
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AssigneeEverspin Technologies, Inc.
InventorsSarin A. Deshpande, Sanjeev Aggarwal, Moazzem Hossain
Estimating the term…
The present disclosure is drawn to, among other things, a method of fabricating an integrated circuit device having a magnetoresistive device. In some aspects, the method includes forming the magnetoresistive device on a first contact of a substrate, wherein the magnetoresistive device includes a fixed magnetic region and a free magnetic region separated by an intermediate region; depositing a first dielectric material over the magnetoresistive device; depositing a second dielectric material over the first dielectric material; polishing a surface of the second dielectric material; forming a first cavity through the polished surface of the second dielectric material to expose a surface of the magnetoresistive device; and depositing an electrically conductive material in the first cavity to form a via.
A method of fabricating an integrated circuit device having a magnetoresistive device, comprising:
A method of fabricating an integrated circuit device having a magnetoresistive device, comprising:
Dependencies are inferred from the claim text.