Piezoelectric thin film element
AssigneeXaar Technology Limited
InventorsPeter Mardilovich, Song-Won Ko, Susan Trolier-McKinstry, Trent Borman
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Abstract
A piezoelectric thin film element comprising a first electrode, a second electrode and one or more piezoelectric thin films there between wherein the first electrode is a platinum metal electrode having an average grain size greater than 50 nm and wherein a piezoelectric thin film adjacent the platinum metal electrode comprises a laminate having a plurality of piezoelectric thin film layers wherein a piezoelectric thin film layer contacting the platinum metal electrode comprises lead zirconate titanate (PZT) of composition at or about PbZrxTi1-xO3 where 0<x≤0.60 and has a degree of pseudo cubic {100} orientation greater than or equal to 90%.
Claims20
A piezoelectric thin film element comprising:
- a first electrode, the first electrode being a platinum metal electrode having an average grain size greater than 50 nm;
- a second electrode;
- and
- one or more piezoelectric thin films there between,
- wherein
- the one or more piezoelectric thin films comprise a piezoelectric thin film adjacent the platinum metal electrode, the piezoelectric thin film comprising a laminate having a plurality of piezoelectric layers, and
- the plurality of piezoelectric layers comprise a piezoelectric layer contacting the platinum metal electrode, the piezoelectric layer comprising lead zirconate titanate (PZT) of composition at or about PbZrxTi1-xO3, where 0<x≤0.60, and having a degree of pseudo cubic {100} orientation greater than 90%.
A method for manufacturing a piezoelectric thin film element comprising:
- forming a platinum metal electrode on a substrate heated to a predetermined temperature at or above 450° C.;
- forming a piezoelectric thin film comprising a laminate of piezoelectric layers on the platinum metal electrode;
- and
- forming a top electrode,
- wherein
- the forming of the piezoelectric thin film comprises forming a piezoelectric layer contacting the platinum metal electrode by a chemical solution deposition, the chemical solution deposition employing a solution having a predetermined excess lead content between 10 mol % and 40 mol %, and
- the piezoelectric layer comprises lead zirconate titanate of composition at or about PbZrxTi1-xO3 where 0<x≤0.60 and has a degree of pseudo cubic {100} orientation greater than or equal to 90%.
A printhead for droplet deposition coupled to a control circuit comprising:
- a first electrode comprising platinum having an average grain size greater than 50 nm;
- a second electrode;
- and
- piezoelectric thin films between the first electrode and the second electrode,
- wherein
- the control circuit is configured to apply a drive voltage between the first electrode and the second electrode, which causes the piezoelectric thin films to deform,
- the piezoelectric thin films comprise a laminate having a plurality of piezoelectric layers, and
- the plurality of piezoelectric layers comprise a piezoelectric layer contacting the platinum metal electrode, the piezoelectric layer comprising lead zirconate titanate (PZT) of composition at or about PbZrxTi1-xO3, where 0<x≤0.60, and having a degree of pseudo cubic {100} orientation greater than 90%.
Dependencies are inferred from the claim text.