Back to results
US 10,541,332 B2Granted
Semiconductor device and method for manufacturing same
AssigneeSony Corporation
InventorYuki Miyanami
Life of this patent
Estimating the term…
Abstract
A semiconductor device includes: a sidewall insulating film; a gate electrode; source and drain regions; a first stress film; and a second stress film.
Claims14
A semiconductor device comprising:
- a sidewall insulating film above a semiconductor substrate;
- a gate insulating film including side surfaces and a bottom surface, the side surfaces connecting with the bottom surface to define a region;
- a gate electrode formed in the region, the gate electrode comprising a metal material;
- source and drain regions in the semiconductor substrate;
- a first stress applying film above the semiconductor substrate;
- and
- a second stress applying film formed above the semiconductor substrate and outside of the first stress applying film, wherein
- the first stress applying film and the second stress applying film have a same stress type,
- the first stress applying film and the second stress applying film are formed of a same material, and
- in a cross section perspective, an uppermost surface of the first stress applying film and an uppermost surface of the second stress applying film are at the same height.
7 more elements
Dependencies are inferred from the claim text.