Boosted vertical field-effect transistor
AssigneeInternational Business Machines Corporation
InventorsInjo Ok, Choonghyun Lee, Soon-Cheon Seo, Seyoung Kim
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AssigneeInternational Business Machines Corporation
InventorsInjo Ok, Choonghyun Lee, Soon-Cheon Seo, Seyoung Kim
Estimating the term…
Techniques related to a boosted vertical field effect transistor and method of fabricating the same are provided. A logic device can comprise a vertical field effect transistor comprising a substrate, a first epitaxial layer and a second epitaxial layer. A bottom source/drain contact can be between a top surface and the first epitaxial layer and a top source/drain contact can be between the top surface and the second epitaxial layer at respective first portions of one or more vertical fins. The logic device can also comprise a boosted bipolar junction transistor. A bipolar junction transistor contact can be between the top surface and the second epitaxial layer at respective second portions of the one or more vertical fins. The respective first portions and the respective second portions can be opposite portions of the one or more vertical fins.
A logic device, comprising:
A method, comprising:
A semiconductor device, comprising:
Dependencies are inferred from the claim text.