Semiconductor memory device and method for manufacturing the same
AssigneeToshiba Memory Corporation
InventorsKatsuyuki Sekine, Tatsuya Kato, Fumitaka Arai, Toshiyuki Iwamoto, Yuta Watanabe, Atsushi Murakoshi
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AssigneeToshiba Memory Corporation
InventorsKatsuyuki Sekine, Tatsuya Kato, Fumitaka Arai, Toshiyuki Iwamoto, Yuta Watanabe, Atsushi Murakoshi
Estimating the term…
In a semiconductor memory device, first insulating films are arranged along a first direction and a second direction and extend in a third direction. Interconnect is disposed between the first insulating films in the first direction and extends in the third direction. Electrodes are disposed between the first insulating films in the first direction on a second direction side of the interconnect, and is arranged along the third direction. Second insulating film is disposed between the interconnect and the electrodes. Semiconductor members are arranged along the third direction between the first insulating films in the second direction and extend in the first direction. The electrode is disposed between the interconnect and the semiconductor members. Third insulating film is disposed between the electrodes and the semiconductor member and is thicker than the second insulating film.
A semiconductor memory device, comprising:
Dependencies are inferred from the claim text.