Three-dimensional memory devices and fabricating methods thereof
AssigneeYangtze Memory Technologies Co., Ltd.
InventorsZiqi Chen, Guanping Wu
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AssigneeYangtze Memory Technologies Co., Ltd.
InventorsZiqi Chen, Guanping Wu
Estimating the term…
A method for forming a 3D memory device is disclosed. The method includes: forming an alternating dielectric stack including multiple first dielectric layers and second dielectric layers on a substrate; forming a channel hole penetrating the alternating dielectric stack, a first diameter of a lower portion of the channel hole being smaller than a second diameter of an upper portion of the channel hole; forming a channel structure including a functional layer in the channel hole, the functional layer including a storage layer; forming an electrode plug in the upper portion of the channel hole; replacing the storage layer in the functional layer in the upper portion of the channel hole with a second insulating layer; and replacing the second dielectric layers in the alternating dielectric stack with conductive layers.
A method for forming a three-dimensional (3D) memory device, comprising:
A three-dimensional (3D) memory device, comprising:
Dependencies are inferred from the claim text.