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US 10,541,191 B2Granted
Elbow contact for field-effect transistor and manufacture thereof
AssigneeInternational Business Machines Corporation
InventorsGuy Cohen, Christian Lavoie, Ahmet Serkan Ozcan, Paul Solomon
Life of this patent
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Abstract
A field-effect transistor (FET) and method of manufacture thereof include a gate, a doped semiconductor structure formed on top of the planar source and drain regions, and a sheath of conducting materials flanking the formed doped semiconductor structure, where the sheath is perpendicular to a surface of the planar source and drain regions.
Claims6
A field-effect transistor (FET) including planar source and drain regions, the FET comprising:
- a gate;
- a doped semiconductor structure formed on top of the planar source and drain regions;
- and
- a sheath of conducting materials flanking the doped semiconductor structure,
- wherein the sheath is perpendicular to a surface of the planar source and drain regions,
- wherein the sheath is bent up, out of plane alongside the gate, to thereby increase a contact area,
- wherein more than one sheath are present per contact of the doped semiconductor structure,
- wherein the planar source and drain regions include a trench,
- wherein the trench includes an elongated pillar extending in a direction of growth through the trench,
- wherein a core of the trench is removed and replaced with a metal, and
- wherein an outside of the elongated pillar includes a metal coating.
8 more elements
Dependencies are inferred from the claim text.