Method and device for evaluating quality of thin film layer
AssigneeSamsung Electronics Co., Ltd.
InventorsXianyu Wenxu, Yongyoung Park, Kideok Bae, Wooyoung Yang, Changseung Lee
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Abstract
A method of evaluating the quality of a thin film layer may include: forming the thin film layer on a substrate; applying a stress to the thin film layer; and evaluating the quality of the thin film layer. A device for evaluating the quality of the thin film layer may include a stress chamber for applying a stress to the thin film layer and a refractive index measuring unit for evaluating the quality of the thin film layer based on a rate of change of a refractive index.
Claims11
A method of evaluating a quality of a thin film layer, the method comprising the following steps in order:
- forming the thin film layer on a substrate;
- measuring a first refractive index of the thin film layer;
- applying a pressure cooker test (PCT) condition to the thin film layer;
- measuring a second refractive index of the thin film layer;
- and
- measuring the quality of the thin film layer by determining a refractive index change rate from the first refractive index and the second refractive index and comparing the determined refractive index change rate to a predetermined threshold change rate.
A method of evaluating a quality of a thin film layer, the method comprising the following steps in order:
- forming the thin film layer on a substrate;
- measuring a first refractive index of the thin film layer;
- applying a pressure cooker test (PCT) condition to the thin film layer;
- measuring a second refractive index of the thin film layer;
- and
- measuring the quality of the thin film layer,
- wherein the measuring the quality comprises comparing the first refractive index to the second refractive index, and
- wherein the measuring the quality comprises not changing a forming condition of the thin film layer if the difference between the first refractive index and the second refractive index is less than 5% and changing the forming condition of the thin film layer if the difference between the first refractive index and the second refractive index is greater than or equal to 5%.
A method of evaluating a quality of a thin film layer, the method comprising the following steps in order:
- forming the thin film layer on a substrate;
- measuring a first refractive index of the thin film layer;
- applying a pressure cooker test (PCT) condition to the thin film layer;
- measuring a second refractive index of the thin film layer;
- and
- measuring the quality of the thin film layer,
- wherein the forming of the thin film layer comprises forming the thin film layer using a fabrication condition of the thin film layer, and
- the evaluating of the quality comprises evaluating a degree of quality deterioration in the thin film layer and comparing the degree of quality deterioration with a predetermined critical value.
Dependencies are inferred from the claim text.