Interconnect structure and method of forming the same
AssigneeTokyo Electron Limited
InventorsSoo Doo Chae, Jeffrey Smith, Gerrit J. Leusink, Robert D. Clark, Kai-Hung Yu
Life of this patent
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AssigneeTokyo Electron Limited
InventorsSoo Doo Chae, Jeffrey Smith, Gerrit J. Leusink, Robert D. Clark, Kai-Hung Yu
Estimating the term…
A semiconductor device is provided. The semiconductor device can have a substrate including dielectric material. A plurality of narrow interconnect openings can be formed within said dielectric material. In addition, a plurality of wide interconnect openings can be formed within said dielectric material. The semiconductor device can include a first metal filling the narrow interconnect openings to form an interconnect structure and conformally covering a surface of the wide interconnect openings formed in the dielectric material, and a second metal formed over the first metal and encapsulated by the first metal to form another interconnect structure within the wide interconnect openings.
A semiconductor device, comprising:
Dependencies are inferred from the claim text.