US 10,541,168 B2 · Edge ring centering method using ring dynamic alignment data

Abstract

A system for determining an alignment of an edge ring on a substrate support includes a robot control module configured to control a robot to place the edge ring onto the substrate support and retrieve the edge ring from the substrate support. An alignment module is configured to determine a plurality of first positions of the edge ring on the robot prior to being placed onto the substrate support and determine a plurality of second positions of the edge ring on the robot subsequent to being retrieved from the substrate support. An edge ring position module configured to determine a centered position of the edge ring relative to the substrate support based on offsets between the plurality of first positions and the plurality of second positions.

Claims19

Dependent claims

A system for determining an alignment of an edge ring on a substrate support, the system comprising:

a robot control module configured to control a robot to place the edge ring onto the substrate support and retrieve the edge ring from the substrate support;
an alignment module configured to (i) calculate a plurality of first positions of the edge ring on the robot prior to being placed onto the substrate support and (ii) calculate a plurality of second positions of the edge ring on the robot subsequent to being retrieved from the substrate support;
and
an edge ring position module configured to calculate a centered position of the edge ring relative to the substrate support based on offsets between the calculated plurality of first positions of the edge ring on the robot prior to being placed onto the substrate support and the calculated plurality of second positions of the edge ring on the robot subsequent to being retrieved from the substrate support.

1 more element

A method for determining an alignment of an edge ring on a substrate support, the method comprising:

controlling a robot to place the edge ring onto the substrate support and retrieve the edge ring from the substrate support;
calculating a plurality of first positions of the edge ring on the robot prior to being placed onto the substrate support;
calculating a plurality of second positions of the edge ring on the robot subsequent to being retrieved from the substrate support;
and
calculating a centered position of the edge ring relative to the substrate support based on offsets between the calculated plurality of first positions of the edge ring on the robot prior to being placed onto the substrate support and the calculated plurality of second positions of the edge ring on the robot subsequent to being retrieved from the substrate support.

2 more elements

Dependencies are inferred from the claim text.

Edge ring centering method using ring dynamic alignment data

Life of this patent

Edge ring centering method using ring dynamic alignment data

Life of this patent

Abstract

Claims19