Processing chamber with irradiance curing lens

A processing chamber, comprising:

• a chamber body having an upper housing and a lower housing defining an interior volume of the processing chamber, the interior volume having a first area and a second area separated by a quartz window;
• a substrate support assembly disposed in the second area, the substrate support assembly configured to support a substrate;
• two light sources disposed above the substrate support assembly in the first area, wherein each light source comprises a bulb disposed in a parabolic shaped primary reflector;
• and
• a plurality of lenses disposed between the two light sources and the quartz window, a first set of the plurality of lenses disposed adjacent the two light sources, a second set of the plurality of lenses coupled to a secondary reflector and disposed between the first set of lenses and the quartz window, the plurality of lenses having a plurality of features formed therein that are configured to direct light from the two light sources preferentially to an area of interest on the substrate when disposed on the substrate support assembly.