Maintenance method of plasma processing apparatus

A maintenance method of a plasma processing apparatus for performing a plasma processing on a workpiece,

• the plasma processing apparatus includes:
• a chamber body that provides a chamber;
• a gas supply unit configured to supply a gas to the chamber, an exhaust device configured to decompress the chamber;
• a plasma source configured to excite the gas inside the chamber;
• a support structure configured to support the workpiece inside the chamber body;
• and a first drive device configured to rotate the support structure inside the chamber about a first axis that extends in a direction orthogonal to a vertical direction,
• wherein the support member includes:
• a holding unit including an electrostatic chuck configured to hold the workpiece and provided to be rotatable around a second axis orthogonal to the first axis;
• a container provided below the holding unit;
• a seal member interposed between the container and the holding unit and configured to separate a space inside the container from the chamber;
• a second drive device provided inside the container and configured to rotate the holding unit around the second axis;
• and a rotary connector electrically connected to an electrode of the electrostatic chuck,
• wherein the container includes:
• a cylindrical container body;
• and a bottom cover closing a bottom side opening of the container body and configured to be detachable from the container body, and
• the maintenance method comprises:
• rotating the support structure about the first axis such that the bottom cover is positioned above the electrostatic chuck;
• removing the bottom cover from the container body;
• and
• maintaining a component provided in the container body.