System and method for scanning an object with an electron beam using overlapping scans and electron beam counter-deflection

A method for scanning an object with a charged particle beam, the method comprising:

• introducing a movement of a constant velocity between the object and charged particle beam optics along a first direction;
• and
• scanning, by the charged particle beam, multiple partially overlapping areas of the object so that at least some points of the multiple areas are scanned multiple times and each area of the multiple areas is scanned by following an area scan scheme that defines a scan pattern having multiple scan lines, wherein each area of the multiple areas corresponds to a different field of view of the charged particle beam optics, and a first area scan scheme used for scanning a first area of the multiple areas is different from a second area scan scheme used for scanning a second area of the multiple areas, the scanning including performing counter-movement deflections of the charged particle beam along a second direction substantially opposite the first direction for at least partially compensating for the movement;
• wherein the scanning is executed by the charged particle beam optics;
• wherein the first area partially overlaps with the second area, the scan pattern of the first area is different from the scan pattern of the second area, and the multiple scan lines of the first area are substantially parallel to the multiple scan lines of the second area;
• wherein the first area scan scheme is used for charging the first area;
• and
• wherein the second area scan scheme is used for discharging the second area.

A method for scanning an object with a charged particle beam, the method comprising:

• introducing a movement of a constant velocity between the object and charged particle beam optics along a first direction;
• and
• scanning, by the charged particle beam, multiple areas of the object, wherein:
• each area of the multiple areas partially overlaps with at least one adjacent area of the multiple areas so that at least some points of the multiple areas are scanned multiple times,
• each area of the multiple areas is scanned by following an area scan scheme that defines a scan pattern having multiple scan lines, wherein a first area of the multiple areas partially overlaps with a second area of the multiple areas, the scan pattern of the first area is different from the scan pattern of the second area, and the multiple scan lines of the first area are substantially parallel to the multiple scan lines of the second area, and
• each area of the multiple areas corresponds to a different field of view of the charged particle beam optics,
• wherein the scanning includes performing counter-movement deflections of the charged particle beam along a second direction substantially opposite the first direction for at least partially compensating for the movement;
• wherein the scanning is executed by the charged particle beam optics.