Charged particle beam device

A charged particle beam device comprising:

• an objective lens that focuses a charged particle beam emitted from a charged particle source;
• a detector that is disposed between the objective lens and the charged particle source;
• a deflector that deflects charged particles emitted from the sample so that the charged particles are more separated from an axis than the charged particle beam;
• an energy spectroscope that performs energy spectral analysis on the charged particles deflected by the deflector;
• and
• a negative voltage applying source that applies a negative voltage to the energy spectroscope and the sample or a sample stage mounted with the sample,
• wherein the energy spectroscope includes an inner electrode and an outer electrode which separate trajectories of charged particles deflected by the deflector, by using an electric field formed between the electrodes,
• wherein the charged particle beam device further includes a power source for the energy spectroscope that applies a positive voltage and a negative voltage to the inner electrode and the outer electrode, respectively, and
• wherein the power source for the energy spectroscope is floated by the negative voltage applying source.

A charged particle beam device comprising:

• a first lens that focuses a charged particle beam emitted from a charged particle source;
• an objective lens that focuses a charged particle beam applied to a sample;
• a detector that is disposed between the objective lens and the first lens;
• a deflector that deflects charged particles emitted from the sample so that the charged particles are more separated from an axis than the charged particle beam;
• and
• an acceleration cylinder that is formed to surround a passing trajectory of the charged particle beam reaching a passing opening of the charged particle beam in the objective lens from a passing opening of the charged particle beam in the first lens, and to which a positive voltage is applied,
• wherein the acceleration cylinder is divided to form a plurality of electrostatic lenses between the deflector and the sample.