US 10,540,783 B2Granted

Image analysis useful for patterned objects

AssigneeIllumina, Inc.

InventorsJohn S. Vieceli, Stephen Tanner, John A. Moon, M. Shane Bowen

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Abstract

Embodiments for registering features in a repeating pattern are described. These embodiments can include providing an object having a repeating pattern of features and a fiducial. These embodiment can also include obtaining a target image of the object, where the target image includes the repeating pattern of features and the fiducial. These embodiment can also include comparing the fiducial in the target image to reference data, where the reference data includes xy coordinates for a virtual fiducial. These embodiment can also include determining locations for the features in the target image based on the comparison of the virtual fiducial in the reference data to the fiducial in the data from the target image. The fiducial can have at least concentric circles that produce three different signal levels. The locations of the features can be determined at a variance of less than 5 μm.

Claims32

Dependent claims

A computer-implemented method for registering features in repeating patterns, comprising:

(a) providing an object having a repeating pattern of features in an xy plane and a fiducial;
wherein the features comprise an area of 100 μm2 or less and a pitch of 5 μm or less and wherein the fiducial comprises at least 3 concentric circles;
(b) obtaining a target image of the object using a detection apparatus, wherein the target image comprises the repeating pattern of features and the fiducial, the features and fiducial being detectable in the target image;
(c) loading, from reference data, xy coordinates for a virtual fiducial, wherein the virtual fiducial comprises a point of reference that is derived from a source other than the object or target image and wherein the virtual fiducial simulates predefined signal levels and xy coordinates for the at least 3 concentric circles, wherein the predefined signal levels comprise at least 3 different predefined signal levels;
(d) computing a cross correlation between the virtual fiducial and the fiducial detectable in the target image to determine an offset between the virtual fiducial in the reference data and the fiducial in the data from the target image;
and
(e) transforming locations for the features in the target image based on the cross correlation.

4 more elements

Dependencies are inferred from the claim text.

Facts

Application: 14/530,299Filed 31 Oct 2014 · us provisional application
Priority: 1 Nov 2013
Published: US 2015/0125053 A17 May 2015
Granted: 21 Jan 2020
Term ends: Not estimatedThe source records don’t support an estimate.

Classification4 codes

G06T 7/74
Using feature-based methods: involving reference images or patches
G06T 2207/30024
Biomedical image processing: cell structures in vitro; Tissue sections in vitro
G06T 2207/30204
Subject of image; Context of image processing: marker
G06T
Image data processing or generation, in general