Inspection method and inspection apparatus

An inspection method of inspecting defects of patterns provided in an inspection region of a sample, using an inspection apparatus comprising a stage having an XY plane on which the sample can be placed and being movable in an X direction and a Y direction and rotatable on a Z axis substantially perpendicular to the XY plane, the method comprising:

• performing rough alignment to confirm whether a position misalignment amount in a rotation direction of the sample with respect to the X direction or the Y direction is equal to or smaller than a first acceptable value;
• and
• performing fine alignment to correct the position misalignment amount to be equal to or smaller than a second acceptable value being smaller than the first acceptable value, wherein
• the performing of the rough alignment comprises
• acquiring an optical image of a first pattern on the inspection region of the sample, the first pattern being previously set as a pattern to be used for the rough alignment,
• moving the stage from a position of the stage at a time of acquisition of the optical image of the first pattern in the X direction or the Y direction by a predetermined movement amount, and
• recognizing that the position misalignment amount is equal to or smaller than the first acceptable value in a case where an optical image of a second pattern on the inspection region, the second pattern being previously set as a pattern to be used for the rough alignment and being positioned to be separated from the first pattern in the X direction or the Y direction, is acquired when the stage is moved by the movement amount, and recognizing that the position misalignment amount is larger than the first acceptable value in a case where an optical image of the second pattern is not acquired, and
• the performing of the fine alignment comprises
• acquiring optical images of a plurality of third patterns to be used for the fine alignment, the third patterns being respectively positioned on a plurality of different corners of a rectangular frame constituted of four sides along the X direction or the Y direction on the inspection region of an optical image of the sample when it is confirmed by the rough alignment that the position misalignment amount is equal to or smaller than the first acceptable value,
• detecting the position misalignment amount on a basis of the acquired optical images of the third patterns, and
• rotating the stage until the detected position misalignment amount becomes equal to or smaller than the second acceptable value.