Position detection apparatus, lens apparatus, image pickup system, machine tool apparatus, position detection method, and non-transitory computer-readable storage medium which are capable of detecting abnormality

A lens apparatus comprising:

• a lens movable in an optical axis direction;
• and
• a position detection apparatus that detects a position of the lens, the position detection apparatus comprising:
• a scale including a substrate on which a periodic pattern is formed;
• a detector, including a light receiving circuit, that generates and outputs a first output signal and a second output signal, the detector and the scale being relatively movable to each other, the detector including:
• a light receiving element array including a plurality of arrayed light receiving elements that receive light from a light source;
• and
• a switch circuit that switches electrical connections of the plurality of arrayed light receiving elements by:
• when acquiring position information of the object, setting a first combination of the plurality of arrayed light receiving elements and maximizing a spatial frequency response of the first output signal at a first spatial frequency;
• and
• when determining whether the defect is present on the scale, setting a second combination of the plurality of arrayed light receiving elements, maximizing a spatial frequency response of the second output signal at a second spatial frequency different from the first spatial frequency, and making a spatial frequency response of the second output signal at a spatial frequency of zero smaller than a spatial frequency response of the first output signal at the first spatial frequency;
• and
• a signal processor that:
• controls the switch circuit which sets the first combination of the plurality of arrayed light receiving elements when acquiring position information of the object;
• controls the switch circuit which sets the second combination of the plurality of arrayed light receiving elements when determining whether the defect is present;
• acquires position information of the object based on the first output signal outputted from the detector, the detector generating the first output signal by adding output signals from the light receiving element array when the first combination of the plurality of arrayed light receiving elements is set;
• and
• determines whether the defect is present on the scale based on the second output signal outputted from the detector, the detector generating the second output signal by adding output signals from the light receiving element array when the second combination of the plurality of arrayed light receiving elements is set.

An image pickup system comprising:

• a lens apparatus comprising:
• a lens movable in an optical axis direction;
• and
• a position detection apparatus that detects a position of the lens, the position detection apparatus comprising:
• a scale including a substrate on which a periodic pattern is formed;
• a detector, including a light receiving circuit, that generates and outputs a first output signal and a second output signal, the detector and the scale being relatively movable to each other, the detector including:
• a light receiving element array including a plurality of arrayed light receiving elements that receive light from a light source;
• and
• a switch circuit that switches electrical connections of the plurality of arrayed light receiving elements by:
• when acquiring position information of the object, setting a first combination of the plurality of arrayed light receiving elements and maximizing a spatial frequency response of the first output signal at a first spatial frequency;
• and
• when determining whether the defect is present on the scale, setting a second combination of the plurality of arrayed light receiving elements, maximizing a spatial frequency response of the second output signal at a second spatial frequency different from the first spatial frequency, and making a spatial frequency response of the second output signal at a spatial frequency of zero smaller than a spatial frequency response of the first output signal at the first spatial frequency;
• and
• a signal processor that:
• controls the switch circuit which sets the first combination of the plurality of arrayed light receiving elements when acquiring position information of the object;
• controls the switch circuit which sets the second combination of the plurality of arrayed light receiving elements when determining whether the defect is present;
• acquires position information of the object based on the first output signal outputted from the detector, the detector generating the first output signal by adding output signals from the light receiving element array when the first combination of the plurality of arrayed light receiving elements is set;
• and
• determines whether the defect is present on the scale based on the second output signal outputted from the detector, the detector generating the second output signal by adding output signals from the light receiving element array when the second combination of the plurality of arrayed light receiving elements is set;
• and
• an image pickup apparatus including an image pickup element that photoelectrically converts an optical image formed via the lens.

A position detection method of detecting a position of an object which moves integrally with one of a scale or a detector based on an output signal from the detector, the scale including a substrate on which a periodic pattern is formed, and the detector, including a light receiving circuit, generating and outputting a first output signal and a second output signal, the detector and the scale being relatively movable to each other, the detector including a light receiving element array, including a plurality of arrayed light receiving elements that receive light from a light source, and a switch circuit that switches a combination of the plurality of arrayed light receiving elements, the method comprising:

• acquiring position information of the object based on the first output signal from the detector obtained by controlling the switch circuit which sets a first combination of the plurality of arrayed light receiving elements and maximizes a spatial frequency response of the first output signal at a first spatial frequency, the detector generating the first output signal by adding output signals from the light receiving element array when the first combination of the plurality of arrayed light receiving elements is set;
• and
• determining whether or not a defect is present on the scale based on the second output signal from the detector obtained by controlling the switch circuit which sets a second combination of the plurality of arrayed light receiving elements, maximizes a spatial frequency response of the second output signal at a second spatial frequency different from the first spatial frequency, and makes a spatial frequency response of the second output signal at a spatial frequency of zero smaller than a spatial frequency response of the first output signal at the first spatial frequency, the detector generating the second output signal by adding output signals from the light receiving element array when the second combination of the plurality of arrayed light receiving elements is set.

A non-transitory computer-readable storage medium storing a program which causes a computer to execute a process of detecting a position of an object which moves integrally with one of a scale or a detector based on an output signal from the detector, the scale including a substrate on which a periodic pattern is formed, and the detector, including a light receiving circuit, generating and outputting a first output signal and a second output signal, the detector and the scale being relatively movable to each other, the detector including a light receiving element array, including a plurality of arrayed light receiving elements that receive light from a light source, and a switch circuit that switches a combination of the plurality of arrayed light receiving elements, the process comprising:

• acquiring position information of the object based on the first output signal from the detector obtained by controlling the switch circuit which sets a first combination of the plurality of arrayed light receiving elements and maximizes a spatial frequency response of the first output signal at a first spatial frequency, the detector generating the first output signal by adding output signals from the light receiving element array when the first combination of the plurality of arrayed light receiving elements is set;
• and
• determining whether or not a defect is present on the scale based on the second output signal from the detector obtained by controlling the switch circuit which sets a second combination of the plurality of arrayed light receiving elements, maximizes a spatial frequency response of the second output signal at a second spatial frequency different from the first spatial frequency, and makes a spatial frequency response of the second output signal at a spatial frequency of zero smaller than a spatial frequency response of the first output signal at the first spatial frequency, the detector generating the second output signal by adding output signals from the light receiving element array when the second combination of the plurality of arrayed light receiving elements is set.

A position detection apparatus which detects a position of an object and whether a defect is present on the scale, the position detection apparatus comprising:

• a scale including a substrate on which a periodic pattern is formed;
• a detector, including a light receiving circuit, that generates and outputs a first output signal and a second output signal, the detector and the scale being relatively movable to each other, the detector including:
• a light receiving element array including a plurality of arrayed light receiving elements that receive light from a light source;
• and
• a switch circuit that switches electrical connections of the plurality of arrayed light receiving elements by:
• when acquiring position information of the object, setting a first combination of the plurality of arrayed light receiving elements and maximizing the spatial frequency response of the first output signal at a first spatial frequency;
• and
• when determining whether the defect is present on the scale, setting a second combination of the plurality of arrayed light receiving elements, maximizing a spatial frequency response of the second output signal at a second spatial frequency different from the first spatial frequency, and making a spatial frequency response of the second output signal at the first spatial frequency of zero smaller than a spatial frequency response of the first output signal at the first spatial frequency;
• and
• a signal processor that:
• controls the switch circuit which sets the first combination of the plurality of arrayed light receiving elements when acquiring position information of the object;
• controls the switch circuit which sets the second combination of the plurality of arrayed light receiving elements when determining whether the defect is present;
• acquires position information of the object based on the first output signal outputted from the detector, the detector generating the first output signal by adding output signals from the light receiving element array when the first combination of the plurality of arrayed light receiving elements is set;
• and
• determines whether the defect is present on the scale based on the second output signal outputted from the detector, the detector generating the second output signal by adding output signals from the light receiving element array when the second combination of the plurality of arrayed light receiving elements is set.

A lens apparatus comprising:

• a lens movable in an optical axis direction;
• and
• a position detection apparatus that detects a position of the lens, the position detection apparatus comprising:
• a scale including a substrate on which a periodic pattern is formed;
• a detector, including a light receiving circuit, that generates and outputs a first output signal and a second output signal, the detector and the scale being relatively movable to each other, the detector including:
• a light receiving element array including a plurality of arrayed light receiving elements that receive light from a light source;
• and
• a switch circuit that switches electrical connections of the plurality of arrayed light receiving elements by:
• when acquiring position information of the object, setting a first combination of the plurality of arrayed light receiving elements and maximizing a spatial frequency response of the first output signal at a first spatial frequency;
• and
• when determining whether the defect is present on the scale, setting a second combination of the plurality of arrayed light receiving elements, maximizing a spatial frequency response of the second output signal at a second spatial frequency different from the first spatial frequency, and making a spatial frequency response of the second output signal at the first spatial frequency of zero smaller than a spatial frequency response of the first output signal at the first spatial frequency;
• and
• a signal processor that:
• controls the switch circuit which sets the first combination of the plurality of arrayed light receiving elements when acquiring position information of the object;
• controls the switch circuit which sets the second combination of the plurality of arrayed light receiving elements when determining whether the defect is present;
• acquires position information of the object based on the first output signal outputted from the detector, the detector generating the first output signal by adding output signals from the light receiving element array when the first combination of the plurality of arrayed light receiving elements is set;
• and
• determines whether the defect is present on the scale based on the second output signal outputted from the detector, the detector generating the second output signal by adding output signals from the light receiving element array when the second combination of the plurality of arrayed light receiving elements is set.

An image pickup system comprising:

• a lens apparatus comprising:
• a lens movable in an optical axis direction;
• and
• a position detection apparatus that detects a position of the lens, the position detection apparatus comprising:
• a scale including a substrate on which a periodic pattern is formed;
• a detector, including a light receiving circuit, that generates and outputs a first output signal and a second output signal, the detector and the scale being relatively movable to each other, the detector including:
• a light receiving element array including a plurality of arrayed light receiving elements that receive light from a light source;
• and
• a switch circuit that switches electrical connections of the plurality of arrayed light receiving elements by:
• when acquiring position information of the object, setting a first combination of the plurality of arrayed light receiving elements and maximizing a spatial frequency response of the first output signal at a first spatial frequency;
• and
• when determining whether the defect is present on the scale, setting a second combination of the plurality of arrayed light receiving elements, maximizing a spatial frequency response of the second output signal at a second spatial frequency different from the first spatial frequency, and making a spatial frequency response of the second output signal at the first spatial frequency of zero smaller than a spatial frequency response of the first output signal at the first spatial frequency;
• and
• a signal processor that:
• controls the switch circuit which sets the first combination of the plurality of arrayed light receiving elements when acquiring position information of the object;
• controls the switch circuit which sets the second combination of the plurality of arrayed light receiving elements when determining whether the defect is present;
• acquires position information of the object based on the first output signal outputted from the detector, the detector generating the first output signal by adding output signals from the light receiving element array when the first combination of the plurality of arrayed light receiving elements is set;
• and
• determines whether the defect is present on the scale based on the second output signal outputted from the detector, the detector generating the second output signal by adding output signals from the light receiving element array when the second combination of the plurality of arrayed light receiving elements is set;
• and
• an image pickup apparatus including an image pickup element that photoelectrically converts an optical image formed via the lens.

A position detection method of detecting a position of an object which moves integrally with one of a scale or a detector based on an output signal from the detector, the scale including a substrate on which a periodic pattern is formed, and the detector, including a light receiving circuit, generating and outputting a first output signal and a second output signal, the detector and the scale being relatively movable to each other, the detector including a light receiving element array, including a plurality of arrayed light receiving elements that receive light from a light source, and a switch circuit that switches a combination of the plurality of arrayed light receiving elements, the method comprising:

• acquiring position information of the object based on the first output signal from the detector obtained by controlling the switch circuit which sets a first combination of the plurality of arrayed light receiving elements and maximizes a spatial frequency response of the first output signal at a first spatial frequency, the detector generating the first output signal by adding output signals from the light receiving element array when the first combination of the plurality of arrayed light receiving elements is set;
• and
• determining whether or not a defect is present on the scale based on the second output signal from the detector obtained by controlling the switch circuit which sets a second combination of the plurality of arrayed light receiving elements, maximizes a spatial frequency response of the second output signal at a second spatial frequency different from the first spatial frequency, and makes a spatial frequency response of the second output signal at the first spatial frequency of zero smaller than a spatial frequency response of the first output signal at the first spatial frequency, the detector generating the second output signal by adding output signals from the light receiving element array when the second combination of the plurality of arrayed light receiving elements is set.

A non-transitory computer-readable storage medium storing a program which causes a computer to execute a process of detecting a position of an object which moves integrally with one of a scale or a detector based on an output signal from the detector, the scale including a substrate on which a periodic pattern is formed, and the detector, including a light receiving circuit, generating and outputting a first output signal and a second output signal, the detector and the scale being relatively movable to each other, the detector including a light receiving element array, including a plurality of arrayed light receiving elements that receive light from a light source, and a switch circuit that switches a combination of the plurality of arrayed light receiving elements, the process comprising:

• acquiring position information of the object based on the first output signal from the detector obtained by controlling the switch circuit which sets a first combination of the plurality of arrayed light receiving elements and maximizes a spatial frequency response of the first output signal at a first spatial frequency, the detector generating the first output signal by adding output signals from the light receiving element array when the first combination of the plurality of arrayed light receiving elements is set;
• and
• determining whether or not a defect is present on the scale based on the second output signal from the detector obtained by controlling the switch circuit which sets a second combination of the plurality of arrayed light receiving elements, maximizes a spatial frequency response of the second output signal at a second spatial frequency different from the first spatial frequency, and makes a spatial frequency response of the second output signal at the first spatial frequency of zero smaller than a spatial frequency response of the first output signal at the first spatial frequency, the detector generating the second output signal by adding output signals from the light receiving element array when the second combination of the plurality of arrayed light receiving elements is set.

A position detection apparatus which detects a position of an object and whether a defect is present on the scale, the position detection apparatus comprising:

• a scale including a substrate on which a periodic pattern is formed;
• a detector, including a light receiving circuit, that generates and outputs a first output signal and a second output signal, the detector and the scale being relatively movable to each other, the detector including:
• a light receiving element array including a plurality of arrayed light receiving elements that receive light from a light source;
• and
• a switch circuit that switches electrical connections of the plurality of arrayed light receiving elements by:
• when acquiring position information of the object, setting a first combination of the plurality of arrayed light receiving elements and maximizing a spatial frequency response of the first output signal at a first spatial frequency;
• and
• when determining whether the defect is present on the scale, setting a second combination of the plurality of arrayed light receiving elements and maximizing a spatial frequency response of the second output signal at a second spatial frequency different from the first spatial frequency;
• and
• a signal processor that:
• controls the switch circuit which sets the first combination of the plurality of arrayed light receiving elements when acquiring position information of the object;
• controls the switch circuit which sets the second combination of the plurality of arrayed light receiving elements when determining whether the defect is present;
• acquires position information of the object based on the first output signal outputted from the detector, the detector generating the first output signal by adding output signals from the light receiving element array when the first combination of the plurality of arrayed light receiving elements is set;
• and
• determines whether the defect is present on the scale based on the second output signal outputted from the detector, the detector generating the second output signal by adding output signals from the light receiving element array when the second combination of the plurality of arrayed light receiving elements is set,
• wherein the scale is configured such that a frequency of the periodic pattern formed on the scale corresponds to the first spatial frequency.

A lens apparatus comprising:

• a lens movable in an optical axis direction;
• and
• a position detection apparatus that detects a position of the lens, the position detection apparatus comprising:
• a scale including a substrate on which a periodic pattern is formed;
• a detector, including a light receiving circuit, that generates and outputs a first output signal and a second output signal, the detector and the scale being relatively movable to each other, the detector including:
• a light receiving element array including a plurality of arrayed light receiving elements that receive light from a light source;
• and
• a switch circuit that switches electrical connections of the plurality of arrayed light receiving elements by:
• when acquiring position information of the object, setting a first combination of the plurality of arrayed light receiving elements and maximizing a spatial frequency response of the first output signal at a first spatial frequency;
• and
• when determining whether the defect is present on the scale, setting a second combination of the plurality of arrayed light receiving elements and maximizing a spatial frequency response of the second output signal at a second spatial frequency different from the first spatial frequency;
• and
• a signal processor that:
• controls the switch circuit which sets the first combination of the plurality of arrayed light receiving elements when acquiring position information of the object;
• controls the switch circuit which sets the second combination of the plurality of arrayed light receiving elements when determining whether the defect is present;
• acquires position information of the object based on the first output signal outputted from the detector, the detector generating the first output signal by adding output signals from the light receiving element array when the first combination of the plurality of arrayed light receiving elements is set;
• and
• determines whether the defect is present on the scale based on the second output signal outputted from the detector, the detector generating the second output signal by adding output signals from the light receiving element array when the second combination of the plurality of arrayed light receiving elements is set,
• wherein the scale is configured such that a frequency of the periodic pattern formed on the scale corresponds to the first spatial frequency.

An image pickup system comprising:

• a lens apparatus comprising:
• a lens movable in an optical axis direction;
• and
• a position detection apparatus that detects a position of the lens, the position detection apparatus comprising:
• a scale including a substrate on which a periodic pattern is formed;
• a detector, including a light receiving circuit, that generates and outputs a first output signal and a second output signal, the detector and the scale being relatively movable to each other, the detector including:
• a light receiving element array including a plurality of arrayed light receiving elements that receive light from a light source;
• and
• a switch circuit that switches electrical connections of the plurality of arrayed light receiving elements by:
• when acquiring position information of the object, setting a first combination of the plurality of arrayed light receiving elements and maximizing a spatial frequency response of the first output signal at a first spatial frequency;
• and
• when determining whether the defect is present on the scale, setting a second combination of the plurality of arrayed light receiving elements and maximizing a spatial frequency response of the second output signal at a second spatial frequency different from the first spatial frequency;
• and
• a signal processor that:
• controls the switch circuit which sets the first combination of the plurality of arrayed light receiving elements when acquiring position information of the object;
• controls the switch circuit which sets the second combination of the plurality of arrayed light receiving elements when determining whether the defect is present;
• acquires position information of the object based on the first output signal outputted from the detector, the detector generating the first output signal by adding output signals from the light receiving element array when the first combination of the plurality of arrayed light receiving elements is set;
• and
• determines whether the defect is present on the scale based on the second output signal outputted from the detector, the detector generating the second output signal by adding output signals from the light receiving element array when the second combination of the plurality of arrayed light receiving elements is set,
• wherein the scale is configured such that a frequency of the periodic pattern formed on the scale corresponds to the first spatial frequency;
• and
• an image pickup apparatus including an image pickup element that photoelectrically converts an optical image formed via the lens.

A position detection method of detecting a position of an object which moves integrally with one of a scale or a detector based on an output signal from the detector, the scale including a substrate on which a periodic pattern is formed, and the detector, including a light receiving circuit, generating and outputting a first output signal and a second output signal, the detector and the scale being relatively movable to each other, the detector including a light receiving element array, including a plurality of arrayed light receiving elements that receive light from a light source, and a switch circuit that switches a combination of the plurality of arrayed light receiving elements, the method comprising:

• acquiring position information of the object based on the first output signal from the detector obtained by controlling the switch circuit which sets a first combination of the plurality of arrayed light receiving elements and maximizes a spatial frequency response of the first output signal at a first spatial frequency, the detector generating the first output signal by adding output signals from the light receiving element array when the first combination of the plurality of arrayed light receiving elements is set;
• and
• determining whether or not a defect is present on the scale based on the second output signal from the detector obtained by controlling the switch circuit which sets a second combination of the plurality of arrayed light receiving elements and maximizes a spatial frequency response of the second output signal at a second spatial frequency different from the first spatial frequency, the detector generating the second output signal by adding output signals from the light receiving element array when the second combination of the plurality of arrayed light receiving elements is set,
• wherein the scale is configured such that a frequency of the periodic pattern formed on the scale corresponds to the first spatial frequency.

A non-transitory computer-readable storage medium storing a program which causes a computer to execute a process of detecting a position of an object which moves integrally with one of a scale or a detector based on an output signal from the detector, the scale including a substrate on which a periodic pattern is formed, and the detector, including a light receiving circuit, generating and outputting a first output signal and a second output signal, the detector and the scale being relatively movable to each other, the detector including a light receiving element array, including a plurality of arrayed light receiving elements that receive light from a light source, and a switch circuit that switches a combination of the plurality of arrayed light receiving elements, the process comprising:

• acquiring position information of the object based on the first output signal from the detector obtained by controlling the switch circuit which sets a first combination of the plurality of arrayed light receiving elements and maximizes a spatial frequency response of the first output signal at a first spatial frequency, the detector generating the first output signal by adding output signals from the light receiving element array when the first combination of the plurality of arrayed light receiving elements is set;
• and
• determining whether or not a defect is present on the scale based on the second output signal from the detector obtained by controlling the switch circuit which sets a second combination of the plurality of arrayed light receiving elements and maximizes a spatial frequency response of the second output signal at a second spatial frequency different from the first spatial frequency, the detector generating the second output signal by adding output signals from the light receiving element array when the second combination of the plurality of arrayed light receiving elements is set,
• wherein the scale is configured such that a frequency of the periodic pattern formed on the scale corresponds to the first spatial frequency.