Lens contamination prevention device and method

Abstract

A lens anti-contamination device is disclosed, including a first device (300) and a second device (400) connected to the first device (300), the first device (300) being closer to a lens (100) relative to the second device (400), wherein the first device (300) is used to output protective layer gas, and the protective layer gas is enabled to uniformly flow in close contact with the lower surface of the lens (100) through a nozzle (330), such that the contaminated lens (100) can be cleaned and a protective layer is funned to prevent the lens from being contaminated again; the second device (400) is used to take away gas close to a contamination source, and the contamination gas enters an annular cavity (420) through small holes (410) and is exhausted into a distant environment through the suction and exhaust power of an exhaust passage (200). A lens anti-contamination method is also disclosed. Before exposure, the first device (300) is turned on and then the second device (400) is turned on; and after 12 hours after exposure, the second device (400) may be turned off. This device and method can better solve the problem that organic matters in photoresist are volatilized and contaminate the lens, it is simple to mount, the service life is long, the cost is low, the reliability is high, and it guarantees that contaminants are fully removed without entering the object lens.

Dependencies are inferred from the claim text.