Optical apparatus, exposure apparatus, method of manufacturing optical apparatus, and method of manufacturing article
AssigneeCanon Kabushiki Kaisha
InventorsTakeshi Nakajima, Satoshi Tomura, Masato Hagiri, Mitsuru Seki
Life of this patent
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Abstract
An optical apparatus includes an optical component, a support mechanism configured to support the optical component, a manipulation mechanism configured to manipulate the optical component while contacting the optical component such that a state of the optical component is changed. The optical component is changed by the manipulation mechanism from a first state in which the optical component is supported by the support mechanism to a second state in which the optical component is supported by the manipulation mechanism.
Claims14
A method of adjusting a state of an optical component using a support mechanism and a manipulation mechanism, the method comprising:
- a setting step of setting the state of the optical component to a first state in which the support mechanism supports the optical component without the manipulation mechanism supporting the optical component;
- a first changing step of changing the state of the optical component to a second state in which the manipulation mechanism supports the optical component;
- and
- a second changing step of changing the state of the optical component to the first state in which the support mechanism supports the optical component without the manipulation mechanism supporting the optical component.
A method of manufacturing an optical apparatus that comprises an optical component, a support mechanism configured to support the optical component, and a manipulation mechanism configured to manipulate the optical component to change a state of the optical component, the method comprising:
- a first setting step of setting the state of the optical component to a first state in which the support mechanism supports the optical component;
- a first changing step of changing the state of the optical component to a second state in which the manipulation mechanism supports the optical component after the first setting step;
- a second changing step of changing the state of the optical component to the first state in which the support mechanism supports the optical component after the first changing step;
- a first adjusting step of adjusting optical characteristics of the optical apparatus after the second changing step;
- a transporting step of transporting the optical apparatus after the first adjusting step;
- a second setting step of setting the state of the optical component to the first state in which the support mechanism supports the optical component after the transporting step;
- a third changing step of changing the state of the optical apparatus to the second state in which the manipulation mechanism supports the optical component after the second setting step;
- and
- a fourth changing step of changing the state of the optical apparatus to the first state in which the support mechanism supports the optical component after the third changing step.
A method of manufacturing an article using an exposure apparatus configured to expose a substrate using an optical component thereof, the method comprising:
- a setting step of setting a state of the optical component to a first state in which a supporting mechanism supports the optical component without a manipulation mechanism supporting the optical component;
- a first changing step of changing the state of the optical component to a second state in which the manipulation mechanism supports the optical component;
- a second changing step of changing the state of the optical component to the first state in which the support mechanism supports the optical component without the manipulation mechanism supporting the optical component;
- an exposing step of exposing a substrate applied with a photosensitive agent with the exposure apparatus;
- forming a pattern by developing the photosensitive agent;
- and
- processing the substrate using the pattern to manufacture the article from the substrate.
Dependencies are inferred from the claim text.