Developing method
AssigneeSCREEN Holdings Co., Ltd.
InventorsMasahiko Harumoto, Koji Kaneyama, Masaya Asai, Yuji Tanaka, Chisayo Nakayama, You Arisawa
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AssigneeSCREEN Holdings Co., Ltd.
InventorsMasahiko Harumoto, Koji Kaneyama, Masaya Asai, Yuji Tanaka, Chisayo Nakayama, You Arisawa
Estimating the term…
After a developing step is performed by feeding developer to the substrate, a second nozzle starts dispensation of a surfactant rinse liquid to a position away from the center of a rotating substrate. This operation is performed such that the center of the substrate does not enter into a reaching region of the substrate where the surfactant rinse liquid dispensed from the second nozzle firstly reaches. Accordingly, a point of the reaching region of the surfactant rinse liquid is dispersed, leading to suppression in locally smaller or larger line width of a resist pattern at the center and around the center of the substrate. Consequently, this achieves enhanced uniformity of the line widths of the resist pattern within a surface of the substrate during the rinse process.
A developing method for performing development to a substrate, the developing method comprising:
A developing method for performing development to a substrate, the developing method comprising:
Dependencies are inferred from the claim text.