Composition for forming organic anti-reflective coating layer suitable for negative tone development

A composition for forming an organic anti-reflective coating layer comprising:

• an isocyanurate compound containing at least one moiety which is represented by following Formula 2;
• a polymer represented by following Formula 3;
• and
• an organic solvent for dissolving the above-mentioned components,
• in Formula 2, R is independently a hydrogen atom or a methyl group, R′ is independently a chain or cyclic saturated or unsaturated hydrocarbyl group of 1 to 15 carbon atoms containing 0 to 6 of hetero atoms, and R″ is independently a chain or cyclic saturated or unsaturated hydrocarbyl group of 1 to 15 carbon atoms containing 0 to 8 of hetero atoms, and two or more moieties represented by the formula 2 are connected through R′,
• In Formula 3, R1 is independently a hydrogen or a methyl group (—CH3), R2 is a hydroxyl group (—OH) or an alkoxyl group of 1 to 5 carbon atoms containing 0 to 2 hydroxyl groups, R3 is a chain or cyclic saturated or unsaturated hydrocarbyl group of 3 to 15 carbon atoms containing 0 to 2 of hetero atoms, R4 is an aryl group of 5 to 15 carbon atoms containing 0 to 3 of hetero atoms, x, y and z each is the mole % of each repeating unit constituting the polymer, x is 40 to 70 mole %, y is 5 to 25 mole % and z is 15 to 45 mole %.