Edge construction on optical devices
AssigneeMellanox Technologies Silicon Photonics Inc.
InventorsWei Qian, Monish Sharma
Life of this patent
Estimating the term…
Abstract
A method of forming an optical device includes forming a waveguide mask on a device precursor. The device precursor includes a waveguide positioned on a base. The method also includes forming a facet mask on the device precursor such that at least a portion of the waveguide mask is between the facet mask and the base. The method also includes removing a portion of the base while the facet mask protects a facet of the waveguide. The portion of the base that is removed can be removed such that a recess is defined in the base and/or a shelf is defined on the device precursor. A light source such as an optical fiber or laser can be received in the recess and/or positioned over the shelf such that the light source is optically aligned with the facet of the waveguide.
Claims23
A method of forming an optical device, comprising:
- forming a waveguide mask on a device precursor,
- the device precursor including a waveguide positioned on a base;
- forming a facet mask on the device precursor such that at least a portion of the waveguide mask is between the facet mask and the base;
- removing a portion of the base while the facet mask protects a facet of the waveguide;
- removing a first portion of the facet mask from over the waveguide after forming the facet mask and before forming the recess;
- forming a recess in the base while a protective portion of the facet mask is over a facet of the waveguide, the protective portion of the facet mask also being over a facet shelf that extends from a side of the recess;
- and
- aligning a light source with the facet such that the light source and the waveguide can exchange light signals.
A method of forming an optical device, comprising:
- forming a waveguide mask on a device precursor,
- the device precursor including a waveguide positioned on a base;
- forming a facet mask on the device precursor such that at least a portion of the waveguide mask is between the facet mask and the base;
- removing a portion of the base while the facet mask protects a facet of the waveguide, the portion of the base being removed such that after removing the portion of the base the facet is above a facet shelf that extends outward from the facet with the waveguide and the facet shelf being on opposing sides of the facet, the facet shelf having a width less than 0.5 μm;
- and
- aligning a light source with the facet such that the light source and the waveguide can exchange light signals.
A method of forming an optical device, comprising:
- forming a waveguide mask on a device precursor,
- the device precursor including a waveguide positioned on a base;
- forming a facet mask on the device precursor such that at least a portion of the waveguide mask is between the facet mask and the base;
- removing a portion of the base while the facet mask protects a facet of the waveguide, the portion of the base being removed such that after removing the portion of the base the facet is above a facet shelf that extends outward from the facet with the waveguide and the facet shelf being on opposing sides of the facet;
- removing from the device precursor a protective portion of the facet mask, the protective portion of the facet mask being a portion of the facet mask that remains on the device precursor after the portion of the base is removed, the protective portion of the facet mask being removed such that a thickness of the facet shelf is reduced, the thickness of the facet shelf being measured in a direction that is perpendicular to the facet;
- and
- aligning a light source with the facet such that the light source and the waveguide can exchange light signals.
A method of forming an optical device, comprising:
- forming a waveguide mask on a device precursor,
- the device precursor including a waveguide positioned on a base;
- forming a facet mask on the device precursor such that at least a portion of the waveguide mask is between the facet mask and the base;
- removing a portion of the base while the facet mask protects a facet of the waveguide, a second portion of the base that remaining on the device precursor undercuts the waveguide after removing the portion of the base;
- forming a recess in the base while a protective portion of the facet mask is over a facet of the waveguide, the protective portion of the facet mask also being over a facet shelf that extends from a side of the recess;
- and
- aligning a light source with the facet such that the light source and the waveguide can exchange light signals.
Dependencies are inferred from the claim text.