Method for controlling the position of a MEMS mirror

At least one non-transitory computer-readable storage medium comprising instructions that when executed by a processor, cause the processor to:

• determine a change in resistance of a detection coil coupled to a microelectromechanical system (MEMS) mirror, the MEMS mirror to tilt about at least one rotational axis based in part on a drive signal and a magnetic field;
• determine a drive signal amplitude to maintain the MEMS mirror at a predefined angular position based in part on the change in resistance;
• and
• send a control signal to current source including an indication to adjust the amplitude of the drive signal based on the drive signal amplitude.

An apparatus comprising:

• a microelectromechanical system (MEMS) mirror;
• a magnet to provide a magnetic field;
• actuator means to receive a drive signal and to cooperate with the magnetic field to apply a force to the MEMS mirror to tilt the MEMS mirror about at least one rotational axis based in part on the drive signal;
• a detection coil coupled to the MEMS mirror;
• and
• driver means to:
• provide the drive signal to the actuator;
• determine a change in resistance of the detection coil;
• determine a drive signal amplitude to maintain the MEMS mirror at a predefined angular position based in part on the change in resistance;
• and
• adjust the amplitude of the drive signal based on the drive signal amplitude.