Tilted chip assembly for optical devices

A microelectromechanical systems (MEMS) package assembly comprising:

• a substrate;
• a housing coupled to the substrate to form a cavity, wherein the housing includes a transparent plate disposed above and parallel to the substrate and is configured to permit a transmission of light therethrough;
• and
• a MEMS chip disposed within the cavity and including a first main surface proximal to the transparent plate and a second main surface opposite to the first main surface and coupled to the substrate,
• wherein the MEMS chip is oriented such that the first main surface is tilted at a tilt angle with respect to the transparent plate,
• the MEMS chip includes a mirror integrated at the first main surface and the mirror is configured to rotate about an axis that extends parallel to a tilt plane of the first main surface such that the axis is tilted at the tilt angle,
• wherein the first main surface of the MEMS chip is a planar surface defining a tilt plane that is inclined with respect to the substrate according to the tilt angle;
• and
• wherein the substrate includes a tilted assembly pad having a wedge shape that protrudes from a main body of the substrate, wherein the tilted assembly pad has a pad surface bonded to the second main surface of the MEMS chip, the pad surface being tilted parallel to the tilt plane.

A microelectromechanical systems (MEMS) package assembly comprising:

• a substrate;
• a housing coupled to the substrate to form a cavity, wherein the housing includes a transparent plate disposed above and parallel to the substrate and is configured to permit a transmission of light therethrough;
• and
• a MEMS chip disposed within the cavity and including a first main surface proximal to the transparent plate and a second main surface opposite to the first main surface and coupled to the substrate,
• wherein the MEMS chip is oriented such that the first main surface is tilted at a tilt angle with respect to the transparent plate,
• the MEMS chip includes a mirror integrated at the first main surface and the mirror is configured to rotate about an axis that extends parallel to a tilt plane of the first main surface such that the axis is tilted at the tilt angle, and
• wherein the first main surface of the MEMS chip is a planar surface defining a tilt plane that is inclined with respect to the substrate according to the tilt angle;
• and
• a wedge structure disposed between the substrate and the MEMS chip, wherein the wedge structure has a wedge surface tilted parallel to the tilt plane;
• and
• a die attach layer configured to attach the MEMS chip, disposed at a first surface of the die attach layer, to the wedge structure, disposed at a second surface of the die attach layer such that the first surface of the die attach layer is in direct contact with the second main surface of the MEMS chip,
• wherein the first surface of the die attach layer is parallel to the tilt plane.

A microelectromechanical systems (MEMS) package assembly comprising:

• a substrate;
• a housing coupled to the substrate to form a cavity, wherein the housing includes a transparent plate disposed above and parallel to the substrate and is configured to permit a transmission of light therethrough;
• and
• a MEMS chip disposed within the cavity and including a first main surface proximal to the transparent plate and a second main surface opposite to the first main surface and coupled to the substrate,
• wherein the MEMS chip is oriented such that the first main surface is tilted at a tilt angle with respect to the transparent plate,
• the MEMS chip includes a mirror integrated at the first main surface and the mirror is configured to rotate about an axis that extends parallel to a tilt plane of the first main surface such that the axis is tilted at the tilt angle, and
• wherein the first main surface of the MEMS chip is a planar surface defining a tilt plane that is inclined with respect to the substrate according to the tilt angle;
• and
• a die attach layer configured to attach the MEMS chip to the substrate, wherein the second main surface of the MEMS chip is directly attached to a first surface of the die attach layer such that the MEMS chip is directly disposed onto the die attach layer, and wherein a second surface of the die attach layer is disposed onto the substrate,
• wherein the MEMS chip has a wedge shape, wherein the first main surface of the MEMS chip is tilted parallel to the tilt plane and the second main surface of the MEMS chip is parallel relative to the substrate.

A method of manufacturing a tilted chip package assembly, comprising:

• attaching a microelectromechanical systems (MEMS) chip, having a first main surface, to a substrate having a planar main surface proximal to the MEMS chip, wherein the MEMS chip is oriented such that the first main surface of the MEMS chip is tilted at a tilt angle with respect to the planar main surface of the substrate, wherein the MEMS chip includes a mirror integrated at the first main surface and the mirror is configured to rotate about an axis that extends parallel to a tilt plane of the first main surface such that the axis is tilted at the tilt angle;
• attaching a housing to the planar main surface of the substrate to form a cavity in which the MEMS chip resides, wherein the housing includes a transparent plate disposed above and parallel to the planar main surface of the substrate and is configured to permit a transmission of light therethrough;
• and
• disposing a die attach layer onto the planar main surface of the substrate, the die attach layer configured to receive the MEMS chip at a first surface of the die attach layer to attach the MEMS chip to the substrate, wherein a second main surface of the MEMS chip, arranged opposite to the first main surface, is directly attached to a first surface of the die attach layer such that the MEMS chip is directly disposed onto the die attach layer,
• wherein the die attach layer has a wedge shape such that the first surface of the die attach layer is tilted at the tilt angle and a second surface of the die attach layer is disposed onto the substrate and is parallel relative to the substrate.

A method of manufacturing a tilted chip package assembly, comprising:

• attaching a microelectromechanical systems (MEMS) chip, having a first main surface, to a substrate having a planar main surface proximal to the MEMS chip, wherein the MEMS chip is oriented such that the first main surface of the MEMS chip is tilted at a tilt angle with respect to the planar main surface of the substrate, wherein the MEMS chip includes a mirror integrated at the first main surface and the mirror is configured to rotate about an axis that extends parallel to a tilt plane of the first main surface such that the axis is tilted at the tilt angle;
• attaching a housing to the planar main surface of the substrate to form a cavity in which the MEMS chip resides, wherein the housing includes a transparent plate disposed above and parallel to the planar main surface of the substrate and is configured to permit a transmission of light therethrough;
• attaching a wedge structure to the planar main surface of the substrate, wherein the wedge structure has a wedge surface tilted at the tilt angle;
• and
• attaching the MEMS chip to the wedge surface via a die attach layer, wherein the die attach layer is configured to attach the MEMS chip, disposed at a first surface of the die attach layer, to the wedge structure, disposed at a second surface of the die attach layer such that the first surface of the die attach layer is in direct contact with a second main surface of the MEMS chip, wherein the second main surface of the MEMS chip is arranged opposite to the first main surface.