Magnification compensation and/or beam steering in optical systems

A method comprising:

• receiving first radiation associated with an object, wherein the object comprises a pattern of a mask;
• directing the first radiation through at least a first set of lenses to obtain selectively magnified first radiation, wherein, during the directing the first radiation, selectively adjusting the first set of lenses to adjust a magnification associated with an image of the object symmetrically along a first direction and a second direction, wherein the image comprises a projection of the object on a wafer, and wherein an image plane is disposed on the wafer;
• and
• directing the selectively magnified first radiation to provide second radiation toward the image plane by adjusting a tilt of a beam steering lens as the wafer is scanned.

A method comprising:

• receiving radiation associated with an object;
• directing the radiation toward an image plane through at least a first set of lenses and a second set of lenses, wherein during the directing:
• selectively adjusting the first set of lenses to adjust a magnification associated with an image of the object symmetrically along a first direction and a second direction;
• and
• selectively adjusting the second set of lenses to adjust the magnification along the first direction or second direction.

An optical system comprising:

• a lens system configured to receive first radiation associated with an object and direct second radiation associated with an image of the object toward an image plane, the lens system comprising:
• a first set of lenses configured to receive and selectively magnify the first radiation;
• a second set of lenses configured to receive and selectively magnify the first radiation;
• and
• an actuator system configured to:
• selectively adjust the first set of lenses to adjust a magnification associated with the image symmetrically along a first direction and a second direction;
• and
• selectively adjust the second set of lenses to adjust the magnification along the first direction or the second direction.