Sensor device with a soft magnetic alloy having reduced coercivity, and method for making same

A method of producing a sensor device, comprising the steps of:

• a) providing a substrate comprising one or more magnetic sensor elements;
• b) depositing a first elastomeric material on top of the one or more magnetic sensor elements;
• c) applying a magnetic layer comprising a soft magnetic metal alloy on top of the first elastomeric material by electroplating or by sputtering;
• further comprising step d) following step b), and before or after step c) of:
• d) depositing a second elastomeric material on top of the magnetic layer, wherein step c) comprises arranging the soft magnetic alloy as an Integrated Magnetic Concentrator (IMC),
• further comprising step e) following step c), and before or after step d) of:
• e) annealing the substrate with the magnetic layer at a temperature in the range from 250° C. to 370° C. for a duration in the range of 10 minutes to 24 hours in the presence of a magnetic field having an intensity that at least partially saturates the soft magnetic metal alloy.