Evaluation apparatus including a plurality of insulating portions surrounding a probe and semiconductor device evaluation method based thereon
AssigneeMitsubishi Electric Corporation
InventorsAkira Okada, Kinya Yamashita, Masaki Ueno
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Abstract
An evaluation apparatus includes an insulating plate, a plurality of probes fixed to the insulating plate, an insulating portion having a connection portion connected to the insulating plate in a detachable manner and a tip portion continuous with the connection portion, the tip portion being narrower than the connection portion, an insulator formed by combining the insulating portions to surround the plurality of probes in planar view, and an evaluation unit for passing currents through the plurality of probes to evaluate electrical characteristics of an object to be measured.
Claims18
An evaluation apparatus comprising:
- an insulating plate;
- a plurality of probes fixed to the insulating plate;
- a plurality of insulating portions each having a connection portion connected to the insulating plate in a detachable manner and a tip portion continuous with the connection portion, the tip portions being narrower than the connection portions;
- an insulator formed by combining the insulating portions to surround the plurality of probes in plan view;
- and
- an evaluation unit for passing currents through the plurality of probes to evaluate electrical characteristics of an object to be measured.
A semiconductor device evaluation method for evaluating electrical characteristics of a semiconductor device, comprising:
- bringing a plurality of probes fixed to an insulating plate into contact with an active area of the semiconductor device;
- bringing an insulator, which is comprised on a plurality of insulating portions each having a tip portion and a connection portion, and which is connected to the insulating plate in a detachable manner to surround the plurality of probes into contact with part of a termination region surrounding the active area of the semiconductor device directly or with a protective member interposed therebetween;
- and
- passing currents through the plurality of probes.
Dependencies are inferred from the claim text.