Transfer unit and prober
AssigneeTokyo Seimitsu Co., Ltd.
InventorsKentaro Sakai, Takekiyo Ichikawa
Life of this patent
Estimating the term…
Abstract
The present invention provides a prober and a transfer unit being capable of improving throughput at each of the measurement units. The prober includes a transfer object housing that houses a plurality of transfer objects, the plurality of measurement units, the transfer unit that moves between the transfer object housing for housing the plurality of transfer objects and the plurality of measurement units to transfer the transfer objects into the transfer object housing or each of the measurement units, and a moving device. The transfer unit includes environment controller configured to control an environment in a casing, and air curtain formation means for causing the casing to be in a sealed or a substantially sealed state.
Claims16
A prober comprising:
- a measurement unit;
- a transfer unit configured to transfer a transfer object to the measurement unit, the transfer unit being distinct and separate from the measurement unit, the transfer unit including a casing configured to house the transfer object therein;
- and
- an environment controller provided in the transfer unit, and configured to control an environment in the casing so as to be closer to an environment of the measurement unit.
A prober comprising:
- a transfer object housing;
- a transfer unit configured to transfer a transfer object to the transfer object housing, the transfer unit being distinct and separate from the transfer object housing, the transfer unit including a casing configured to house the transfer object therein;
- and
- an environment controller provided in the transfer unit, and configured to control an environment in the casing so as to be closer to an environment of the transfer object housing.
A prober comprising:
- a measurement unit;
- a transfer object housing;
- a transfer unit configured to transfer a transfer object between the transfer object housing and the measurement unit, the transfer unit being distinct and separate from the measurement unit and the transfer object housing, the transfer unit including a casing configured to house the transfer object therein;
- and
- an environment controller provided in the transfer unit, and configured to control an environment in the casing,
- wherein the environment controller controls the environment in the casing so as to be closer to an environment of the measurement unit when the transfer object is transferred to the measurement unit, and
- wherein the environment controller controls the environment in the casing so as to be closer to an environment of the transfer object housing when the transfer object is transferred to the transfer object housing.
A prober comprising:
- a measurement unit;
- a transfer unit configured to transfer a transfer object to the measurement unit, the transfer unit being distinct and separate from the measurement unit, the transfer unit including a casing configured to house the transfer object therein;
- and
- an environment controller provided in the transfer unit, and configured to control an environment in the casing such that a temperature in the casing becomes closer to an inspection temperature of the measurement unit.
Dependencies are inferred from the claim text.