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US 10,539,526 B2Granted
Micro sensor
AssigneePoint Engineering Co., Ltd.
InventorsBum Mo Ahn, Seung Ho Park, Sung Hyun Byun
Life of this patent
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Abstract
Disclosed is a micro sensor. Particularly, disclosed is a micro sensor capable of changing a resistance value of a resistance unit connected to a sensor electrode depending on a sensing material, the resistance unit having at least two resistors.
Claims20
A micro sensor for sensing gas, the micro sensor comprising:
- a substrate;
- a sensing material provided on the substrate;
- a heater electrode provided on the substrate for heating the sensing material;
- a sensor electrode provided on the substrate for detecting a change of an electrical characteristic when the gas is adsorbed onto the sensing material heated by the heater electrode;
- and
- a resistance unit including at least two resistors and provided on the substrate, the resistance unit being electrically connected to the sensor electrode,
- wherein a resistance value of the resistance unit is adjusted by connecting the at least two resistors using wire bonding or by cutting off an unnecessary resistor among the at least two resistors that are connected in advance, depending on the sensing material.
4 more elements
Dependencies are inferred from the claim text.