Back to results
US 10,539,512 B2Granted
Block-to-block reticle inspection
AssigneeKLA-Tencor Corporation
InventorsAbdurrahman Sezginer, Patrick LoPresti, Joe Blecher, Rui-fang Shi, Yalin Xiong, John Fielden
Life of this patent
Estimating the term…
Abstract
Block-to-block reticle inspection includes acquiring a swath image of a portion of a reticle with a reticle inspection sub-system, identifying a first occurrence of a block in the swatch image and at least a second occurrence of the block in the swath image substantially similar to the first occurrence of the block and determining at least one of a location, one or more geometrical characteristics of the block and a spatial offset between the first occurrence of the block and the at least a second occurrence of the block.
Claims15
A method for design database assisted block-to-block reticle inspection comprising:
- identifying, with one or more processors, a set of repeating blocks of a single-die reticle within a design database of the reticle, wherein the identifying a set of repeating blocks of the single-die reticle within the database for the single die reticle is performed by examining a hierarchy in the database for the single-die reticle;
- determining, with the one or more processors, one or more spatial characteristics associated with the set of repeating blocks of the single-die reticle;
- storing, in memory, the one or more spatial characteristics associated with the set of repeating blocks of the single-die reticle;
- acquiring an image of a portion of a single die of the single-die reticle with a reticle inspection sub-system;
- identifying, with the one or more processors, within the single die of the single-die reticle, a first portion of the acquired image corresponding with a first member of the set of repeating blocks according to the stored spatial characteristics associated with the set of repeating blocks by matching the first portion of the acquired image with the first member of the set of repeating blocks found within the design database;
- identifying, with the one or more processors, within the single die of the single-die reticle, a second portion of the acquired image that corresponds to a second member of the set of repeating blocks according to the stored spatial characteristics associated with the set of repeating blocks by matching the second portion of the acquired image with the second member of the set of repeating blocks found within the design database;
- aligning, with the one or more processors, the first portion of the acquired image and the second portion of the acquired image;
- generating, with the one or more processors, a difference image by performing a subtraction routine on the first portion of the acquired image and the second portion of the acquired image;
- and
- identifying, with the one or more processors, one or more defects within the single die on the single-die reticle with the generated difference image, wherein resultant repeating block information is merged with an inspection report associated with the single-die reticle.
7 more elements
A system comprising:
- a reticle inspection sub-system configured for scanning a swath image of a portion of a single-die reticle with a reticle inspection system, wherein the reticle inspection sub-system includes one or more illumination sources, a set of illumination optics and one or more detectors;
- and
- a controller including one or more processors configured to execute a set of program instructions maintained on a memory, the program instructions configured to cause the one or more processors to:
- identify a set of repeating blocks of a single-die reticle within a design database of the reticle, wherein the identifying a set of repeating blocks of the single-die reticle within the database for the single die reticle is performed by examining a hierarchy in the database for the single-die reticle;
- determine one or more spatial characteristics associated with the set of repeating blocks of the single-die reticle;
- store the one or more spatial characteristics associated with the set of repeating blocks of the single-die reticle
- acquire an image of a portion of a single die of the single-die reticle with a reticle inspection sub-system;
- identify, within the single die, a first portion of the acquired image corresponding with a first member of the set of repeating blocks according to the stored spatial characteristics associated with the set of repeating blocks by matching the first portion of the acquired image with the first member of the set of repeating blocks found within the design database;
- identify, within the single die, a second portion of the acquired image corresponding with a second member of the set of repeating blocks according to the stored spatial characteristics associated with the set of repeating blocks by matching the second portion of the acquired image with the second member of the set of repeating blocks found within the design database;
- align the first portion of the acquired image and the second portion of the acquired image;
- generate a difference of image by performing a subtraction routine on the first portion of the acquired image and the second portion of the acquired image;
- and
- identify one or more defects within the single die on the single-die reticle with the generated difference image, wherein resultant repeating block information is merged with an inspection report associated with the single-die reticle.
10 more elements
A system comprising:
- a controller including one or more processors configured to execute a set of program instructions maintained on a memory, the program instructions configured to cause the one or more processors to:
- identify a set of repeating blocks of a single-die reticle within a design database of the single-die reticle, wherein the identifying a set of repeating blocks of the single-die reticle within the database for the single die reticle is performed by examining a hierarchy in the database for the single-die reticle;
- determine one or more spatial characteristics associated with the set of repeating blocks of the single-die reticle;
- store the one or more spatial characteristics associated with the set of repeating blocks of the single-die reticle
- receive an image of a portion of the single-die reticle from a reticle inspection sub-system;
- identify, within a single die of the single-die reticle, a first portion of the acquired image corresponding with a first member of the set of repeating blocks according to the stored spatial characteristics associated with the set of repeating blocks by matching the first portion of the acquired image with the first member of the set of repeating blocks found within the design database;
- identify, within the single die, a second portion of the acquired image corresponding with a second member of the set of repeating blocks according to the stored spatial characteristics associated with the set of repeating blocks by matching the second portion of the acquired image with the second member of the set of repeating blocks found within the design database;
- align the first portion of the acquired image and the second portion of the acquired image;
- generate a difference of image by performing a subtraction routine on the first portion of the acquired image and the second portion of the acquired image;
- and
- identify one or more defects within the die on the single-die reticle with the generated difference image, wherein resultant repeating block information is merged with an inspection report associated with the single-die reticle.
8 more elements
Dependencies are inferred from the claim text.