Microelectromechanical gyroscope for sensing angular rate and method of sensing angular rate

A microelectromechanical gyroscope comprising:

• a substrate;
• a pair of stator sensing structures fixed to the substrate;
• an actuation structure;
• a first mass elastically coupled to the substrate and movable with respect to the substrate along a first axis, wherein the actuation structure is configured to cause the first mass to move along the first axis;
• a second mass elastically coupled to the substrate and to the first mass, the first mass being configured to cause the second mass to move with respect to the substrate along a second axis that is transverse to the first axis;
• a third mass elastically coupled to the second mass, the second mass being configured to cause the third mass to move along the second axis;
• and
• a pair of movable sensing structures elastically coupled to opposing ends of the third mass, the pair of movable sensing structures being capacitively coupled to the pair of stator sensing structures.

An electronic system, comprising:

• a microelectromechanical gyroscope including:
• a substrate;
• a pair of stator sensing structures fixed to the substrate;
• a first mass elastically coupled to the substrate and movable with respect to the substrate in a first direction;
• a second mass elastically coupled to the first mass and the substrate and movable with respect to the first mass in a second direction that is transverse to the first direction;
• a third mass elastically coupled to the second mass, the third mass not being directly coupled to the substrate, the second mass being configured to cause the third mass to move in the second direction;
• and
• a pair of movable sensing structures elastically coupled to opposing ends of the third mass, the pair of movable sensing structures being capacitively coupled to the pair of stator sensing structures;
• and
• a control unit coupled to the gyroscope.