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US 10,539,412 B2Granted
Measuring and correcting optical misalignment
AssigneeHewlett-Packard Development Company, L.P.
InventorsRobert S Mueller, Jamie Etcheson, Christopher S Tanner
Life of this patent
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Abstract
A system includes a calibration plate with fiducial markers, a device under test interface, an alignment stage with a rotary sub-stage and a linear sub-stage, and a camera on the alignment stage.
Claims18
A system comprising:
- a device under test (DUT) interface to receive a DUT;
- a calibration plate with fiducial markers;
- an alignment stage comprising:
- a rotary sub-stage,
- a linear sub-stage, and
- a camera on the alignment stage to capture a first image of the calibration plate, and to capture a second image of the calibration plate with a light pattern from the DUT;
- and
- a controller to:
- determine, based on representations of the fiducial markers in the first image, an adjustment of the alignment stage,
- adjust, based on the determined adjustment, at least one of the rotary sub-stage to rotate the camera or the linear sub-stage to translate the camera, and
- determine if the DUT meets a specification based on the second image.
8 more elements
A method comprising:
- receiving, by a controller from a camera mounted on an alignment stage, a first image of a calibration plate with fiducial markers;
- determining, by the controller based on locations of the fiducial markers in the first image, an adjustment of the alignment stage;
- adjusting, based on the determined adjustment, the alignment stage by rotating a rotary sub-stage of the alignment stage or translating a linear sub-stage of the alignment stage;
- projecting onto the calibration plate a light pattern from a device under test (DUT);
- using the camera to capture a second image of the light pattern on the calibration plate relative to the fiducial markers;
- and
- determining if the DUT meets a specification based on the second image.
4 more elements
A non-transitory computer readable medium encoded with instructions that upon execution cause a controller to:
- use a camera mounted on an alignment stage to capture a first image of a calibration plate with fiducial markers;
- determine, based on locations of the fiducial markers in the first image, an adjustment of the alignment stage;
- adjust, based on the determined adjustment, the alignment stage by rotating a rotary sub-stage of the alignment stage or translating a linear sub-stage of the alignment stage;
- use the camera to capture a second image of a light pattern projected by a device under test (DUT) on the calibration plate relative to the fiducial markers;
- and
- determine if the DUT meets a specification based on the second image.
3 more elements
Dependencies are inferred from the claim text.