Gate-valve attaching structure

A gate-valve attaching structure for firmly attaching a plurality of gate valves adjacent to each other between a first chamber and a second chamber each having a plurality of chamber openings,

• wherein each gate valve includes a hollow valve housing having a pair of gate openings, a valve body moving in the valve housing to establish or interrupt communication between the pair of gate openings, and a valve drive unit operating the valve body,
• wherein the valve housing has a pair of side wall faces having the gate openings and facing away from each other and a pair of side end faces coupling opposite side ends of the side wall faces and facing away from each other, and is fixed to both the first chamber and the second chamber such that the pair of gate openings are connected to the chamber openings of the first and second chambers and the pair of side wall faces are airtightly pressed against the first and second chambers,
• wherein the side end faces, facing each other, of the valve housings of adjacent gate valves define a fixing space having an axis extending along the side ends of the side wall faces, the fixing space has a first end and a second end in a direction along the axis, the first and second ends serve as openings, the side end faces facing each other include a pair of protruding walls extending along the axis and protruding from the respective side end faces into the fixing space, and the fixing space accommodates a valve fixing mechanism for fixing the gate valves to the second chamber, and
• wherein the valve fixing mechanism includes a support member fixed to the second chamber in middle part of the fixing space in the direction along the axis, a pair of lever members each including fulcrum part in pressure contact with a supporting portion, facing toward the second chamber, of the support member, load part in contact with the pair of protruding walls to exert a pressing force on the second chamber, and effort part to which a force directed toward the second chamber is applied, and a pair of fixing operation members applying the force to the effort part of each lever member and pressing the pair of protruding walls against the second chamber, and the pair of lever members are arranged on both sides of the support member in the direction along the axis such that the effort parts of the lever members are located closer to the openings at the first and second ends than the load part.