Method for manufacturing metal or metal oxide porous thin films having a three-dimensional open network structure through pore size adjustment in a dry process, and films manufactured by said method
AssigneeKorea Institute of Industrial Technology
InventorsHo Nyun Lee, Hyun Jong Kim
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Abstract
A method for manufacturing a metal or metal oxide porous thin film having a three-dimensional open-network structure by controlling its pore size through a dry process is provided. The film can be used in a gas sensor, a biosensor, a battery capacitor, a fuel cell, a solar cell, a chemical catalyst, or an antibacterial filter.
Claims13
A method for manufacturing a metal porous thin film having a three-dimensional open-network structure by controlling its pore size in a dry process, the method comprising:
- i) fixing a substrate to a metal porous thin film having a three-dimensional open-network structure deposition chamber and providing a vacuum state;
- ii) injecting an inert gas into the chamber in a vacuum state and providing a constant pressure therein;
- iii) setting the temperature of the substrate at 50° C. or below;
- iv) increasing the temperature of an evaporation source, in which a metal sample is contained to a temperature of evaporation or higher, the metal sample thereby forming a metal vapor by a thermal evaporation process;
- and
- v) depositing the metal vapor on top of the substrate;
- wherein, in step ii), the pressure is controlled in a range of 0.05 Torr to 10 Torr;
- and
- wherein, in step v), the temperature of the substrate is maintained at the same temperature as that of step iii) with a temperature deviation of ±5° C.;
- and
- wherein, in step v), the deposition rate is in a range of 0.1 μm/min to 5 μm/min.
A method for manufacturing a metal oxide porous thin film having a three-dimensional open-network structure by controlling its pore size in a dry process, the method comprising:
- i) fixing a substrate to a metal oxide porous thin film having a three-dimensional open-network structure deposition chamber and providing a vacuum state;
- ii) injecting an inert gas into the chamber in a vacuum state and providing a constant pressure therein;
- iii) setting the temperature of the substrate at 5020 C. or below;
- iv) increasing the temperature of an evaporation source, in which a metal or metal oxide sample is contained to a temperature of evaporation or higher, the metal sample thereby forming a metal or metal oxide vapor by a thermal evaporation process;
- and
- v) reacting the metal oxide vapor when oxygen is present in the chamber, or depositing the metal vapor on top of the substrate in an oxide state without reacting when oxygen is absent in the chamber;
- wherein, in step ii), the oxygen is able replace part or the entirety of the inert gas;
- wherein, in step ii), the pressure is controlled in a range of 0.1 Torr to 10 Torr;
- and
- wherein, in step v), the temperature of the substrate is maintained at the same temperature as that of step iii) with a temperature deviation of ±5° C.;
- wherein, in step v), the deposition rate is in the range of 0.2 μm/min to 5 μm/min;
- and
- the surface area of the metal oxide thin film being deposited is in a range of 30 m2/g to 600 m2/g.
Dependencies are inferred from the claim text.