Yttrium fluoride spray material, yttrium oxyfluoride-deposited article, and making methods
AssigneeShin-Etsu Chemical Co., Ltd.
InventorsYasushi Takai, Noriaki Hamaya
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Abstract
An yttrium fluoride spray material contains Y5O4F7 and YF3, and has an average particle size of 10-60 μm and a bulk density of 1.2-2.5 g/cm3. The Y5O4F7 and YF3 in the yttrium fluoride spray material consist of 30 to 90% by weight of Y5O4F7 and the balance of YF3. A sprayed coating of yttrium oxyfluoride is obtained by atmospheric plasma spraying of the spray material.
Claims8
A spray material comprising yttrium compounds, the yttrium compounds consisting of 30 to 71% by weight of Y5O4F7 and the balance 29 to 70% by weight of YF3, with respect to the total of Y5O4F7 and YF3, and the spray material having an average particle size of 10 to 60 μm and a bulk density of 1.2 to 2.5 g/cm3.
Dependencies are inferred from the claim text.