Correction of fabricated shapes in additive manufacturing
AssigneeApplied Materials, Inc.
InventorsMayu Felicia Yamamura, Jason Garcheung Fung, Daniel Redfield, Rajeev Bajaj, Hou T. Ng
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Abstract
A method of fabricating a polishing pad using an additive manufacturing system includes receiving data indicative of a desired shape of the polishing pad to be fabricated by droplet ejection. The desired shape defines a profile including a polishing surface and one or more grooves on the polishing pad. Data indicative of a modified pattern of dispensing feed material is generated to at least partially compensate for distortions of the profile caused by the additive manufacturing system, and a plurality of layers of the feed material are dispensed by droplet ejection in accordance to the modified pattern.
Claims19
A method of fabricating a polishing pad using an additive manufacturing system, the method comprising:
- receiving data indicative of a desired shape of the polishing pad to be fabricated by droplet ejection, the desired shape defining a profile including a polishing surface and one or more grooves on the polishing pad;
- generating data indicative of a modified pattern of dispensing feed material to at least partially compensate for distortions of the profile caused by the additive manufacturing system;
- and
- dispensing a plurality of layers of the feed material by droplet ejection in accordance to the modified pattern.
A computer program product, tangibly embodied in a non-transitory computer readable medium, comprising instructions to cause a processor to:
- receive data indicative of a desired shape of a polishing pad to be fabricated by droplet ejection in an additive manufacturing system, the desired shape defining a profile including a polishing surface and one or more grooves on the polishing pad;
- generate data indicative of a modified pattern of dispensing feed material to at least partially compensate for distortions of the profile caused by the additive manufacturing system;
- and
- cause the additive manufacturing system to dispense a plurality of layers of the feed material by droplet ejection in accordance to the modified pattern.
An additive manufacturing system, comprising:
- a platform to hold a polishing pad being fabricated;
- a printhead to form a plurality of layer by ejecting droplets onto the platform or a previously deposited layer of the polishing pad;
- and
- a controller configured to
- receive data indicative of a desired shape of the polishing pad, the desired shape defining a profile including a polishing surface and one or more grooves on the polishing pad;
- generate data indicative of a modified pattern of dispensing feed material to at least partially compensate for distortions of the profile caused by the additive manufacturing system;
- and
- cause the printhead to dispense a plurality of layers of the feed material by droplet ejection in accordance to the modified pattern.
Dependencies are inferred from the claim text.