Back to results
US 10,537,965 B2Granted
Fiber array line generator
AssigneeApplied Materials, Inc.
InventorsDouglas E. Holmgren, Samuel C. Howells, Aaron Muir Hunter, Theodore P. Moffitt, Diwakar N. Kedlaya
Life of this patent
Estimating the term…
Abstract
Embodiments described herein relate to the rapid thermal processing of substrates. A fiber coupled laser diode array is provided in an optical system configured to generate a uniform irradiance pattern on the surface of a substrate. A plurality of individually controllable laser diodes are optically coupled via a plurality of fibers to one or more lenses. The fiber coupled laser diode array generates a Gaussian radiation profile which is defocused by the lenses to generate a uniform intensity image. In one embodiment, a field stop is disposed within the optical system.
Claims14
An apparatus for processing a substrate, comprising:
- a plurality of laser diodes;
- a plurality of fibers optically coupled to the plurality of laser diodes, and wherein a distal end of each of the fibers is spaced between 0.1 mm and 1.0 mm from each adjacent fiber, the distal ends of the fibers positioned within a single plane to within 20 μm or less;
- a first lens disposed proximate a distal end of the plurality of fibers, wherein the first lens is a cylindrical microlens array, wherein the first lens defocuses light propagating from the distal ends of the plurality of fibers in a direction parallel to a line which passes through all distal ends of the fibers of the plurality of fibers;
- and
- a second lens disposed proximate the first lens and configured to focus light propagating from the distal ends of the fibers, wherein the second lens reimages the light propagating from the distal ends of the fibers into a line image onto a work surface at a magnification of 1× in a direction perpendicular to a line which passes through all distal ends of the fibers of the plurality of fibers after defocusing by the first lens, wherein the line image is reproduced in a direction parallel to the direction of the propagation of light through the distal ends of the fibers of the plurality of fibers, and wherein the first lens and second lens form an anamorphic optical imaging system.
2 more elements
An apparatus for processing a substrate, comprising:
- a plurality of laser diodes;
- a plurality of fibers optically coupled to the plurality of laser diodes, and wherein a distal end of each of the fibers is spaced between 0.1 mm and 1.0 mm from each adjacent fiber, the distal ends of the fibers positioned within a single plane;
- a first lens disposed proximate a distal end of the plurality of fibers, wherein the first lens is a cylindrical microlens array having a plurality of cylindrical lenses, each cylindrical lens of the microlens array optically coupled to an individual fiber of the plurality of fibers, wherein the first lens defocuses light propagating from the distal ends of the fibers in a direction parallel to a line which passes through all distal ends of the fibers of the plurality of fibers;
- a second lens disposed proximate the first lens and configured to focus light propagating from the distal ends of the fibers, wherein the second lens reimages the light propagating from the distal ends of the fibers into a line image onto a work surface at a magnification of 1× in a direction perpendicular to a line which passes through all distal ends of the fibers of the plurality of fibers, wherein the line image is reproduced in a direction parallel to the direction of the propagation of light through the distal ends of the fibers of the plurality of fibers, after defocusing by the first lens;
- a field stop disposed proximate the second lens;
- and
- a third lens disposed between the field stop and the work surface, wherein the first lens, second lens, and third lens form an anamorphic optical imaging system.
4 more elements
An apparatus for processing a substrate, comprising:
- a plurality of fiber coupled laser diodes, wherein each fiber coupled laser diode comprises an individually controllable laser diode and is fiber optically coupled to the laser diode, and wherein a distal end of each of the fibers is spaced between 0.1 mm and 1.0 mm from each adjacent fiber, the distal ends of the fibers positioned within a single plane;
- a cylindrical microlens array disposed between an image plane and the distal ends of the fibers of the fiber coupled laser diodes, wherein each cylindrical lens of the microlens array is optically coupled to an individual fiber of the plurality of fiber coupled laser diodes, wherein the cylindrical microlens array defocuses light propagating from the distal ends of the fibers in a direction parallel to a line which passes through all distal ends of the fibers of the plurality of fibers, and wherein the image plane is located between 5 mm and 6 mm from the distal ends of the fibers of the fiber coupled laser diodes;
- and
- a first lens disposed proximate the cylindrical microlens array and configured to focus light propagating from the distal ends of the fibers of the fiber coupled laser diodes, wherein the first lens reimages the light propagating from the distal ends of the fibers into a line image onto a work surface at a magnification of 1× in a direction perpendicular to a line which passes through all distal ends of the fibers of the plurality of fibers after defocusing by the cylindrical microlens array, wherein the line image is reproduced in a direction parallel to the direction of the propagation of light through the distal ends of the fibers of the plurality of fibers, wherein the cylindrical microlens array and the first lens form an anamorphic optical imaging system.
1 more element
Dependencies are inferred from the claim text.