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US 10,537,824 B2Granted
Hexavalent chromium free etch manganese recovery system
AssigneeSRG Global, Inc.
InventorsMark Bauman, Daniel Lacey, Gerry Vogelpohl
Life of this patent
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Abstract
Methods for recovering manganese etchant solutions are provided wherein a process solution used to rinse or neutralize a nonconductive substrate after etching the substrate is collected and evaporated to provide a concentrated process solution that is fed back into the manganese etchant solution or acid rinse.
Claims24
A method for recovering manganese etchant solution, the method comprising:
- etching a nonconductive substrate with a manganese etchant solution;
- neutralizing with a neutralizer the nonconductive substrate after etching the substrate with the manganese etchant solution, wherein the neutralizer comprises a process solution comprising an acid and an oxidizer;
- removing from the neutralizer at least a portion of the process solution to an evaporator assembly;
- evaporating the process solution in the evaporator assembly to remove water from the process solution to form a concentrated process solution;
- and
- adding the concentrated process solution to the manganese etchant solution or an acid rinse.
3 more elements
A method for recovering manganese etchant solution, the method comprising:
- etching a nonconductive substrate with a manganese etchant solution;
- rinsing the nonconductive substrate in an acid based rinsate;
- neutralizing with a neutralizer the nonconductive substrate after etching the substrate with the manganese etchant solution, wherein the neutralizer comprises a process solution comprising an acid and an oxidizer, wherein the neutralizing results in a used process solution comprising manganese ions;
- concentrating at least a portion of the used process solution to a manganese ion concentration similar to the manganese etchant solution;
- and
- feeding the concentrated used process solution into the manganese etchant solution or an acid rinse.
3 more elements
Dependencies are inferred from the claim text.