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US 10,535,493 B2Granted
Photocathode designs and methods of generating an electron beam using a photocathode
AssigneeKLA-Tencor Corporation
InventorsKaterina Ioakeimidi, Gildardo R. Delgado, Michael E. Romero, Frances Hill, Rudy F. Garcia
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Abstract
A photocathode can include a body fabricated of a wide bandgap semiconductor material, a metal layer, and an alkali halide photocathode emitter. The body may have a thickness of less than 100 nm and the alkali halide photocathode may have a thickness less than 10 nm. The photocathode can be illuminated with a dual wavelength scheme.
Claims19
A photocathode comprising:
- a body fabricated of a wide bandgap semiconductor material, wherein the body has a first surface and a second surface opposite the first surface, and wherein the body has a thickness between the first surface and the second surface of less than 100 nm;
- a metal layer disposed on the first surface, wherein the metal layer includes one or more of ruthenium or iridium;
- and
- an alkali halide photocathode emitter disposed on the second surface, wherein the alkali halide photocathode has a thickness less than 10 nm.
1 more element
A method comprising:
- illuminating a photocathode with a photon beam having a dual wavelength scheme, wherein the photocathode includes an alkali halide photocathode disposed on a body, wherein the body is fabricated of a wide bandgap semiconductor material, wherein the body has a first surface and a second surface opposite the first surface, wherein the alkali halide photocathode emitter is disposed on the second surface, wherein the photocathode further includes a metal layer disposed on the first surface, and wherein the metal layer includes one or more of ruthenium or iridium;
- and
- generating an electron beam as the photocathode is illuminated with the photon beam.
Dependencies are inferred from the claim text.