Method of producing lift out specimens for teaching, practice, and training

Abstract

A method for creating a low-cost specimen used for training users in lift out techniques is prepared using additive manufacturing. This replaces the more expensive and time-intensive subtractive manufacturing methods traditionally used that operate by milling or ablation with charged particle focused ion beam (FIB) instruments or lasers. The method comprises building up a sample from a substrate surface using additive manufacturing, building up trench walls within the sample that frame a trench using additive manufacturing, and building up a specimen between the trench walls using additive manufacturing. In a preferred form, the specimen has a shape taken from the group consisting of a lamella, a rectangular cuboid, a triangular prism, and a regular prism. Tabs and other support structures may be eliminated using subtractive milling or chemical dissolving methods to create a freestanding specimen separate from the trench.

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