Electron beam apparatus
AssigneeHitachi High-Technologies Corporation
InventorsKeigo Kasuya, Noriaki Arai, Toshiaki Kusunoki, Takashi Ohshima, Tomihiro Hashizume, Yusuke Sakai
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Abstract
An electron beam apparatus which can stably achieve high spatial resolution also during low acceleration observation using CeB6 for the CFE electron source is provided. In an electron beam apparatus having a CFE electron source, the emitter of the electron beam of the CFE electron source is Ce hexaboride or a hexaboride of a lanthanoid metal heavier than Ce, the hexaboride emits the electron beam from the {310} plane, and the number of the atoms of the lanthanoid metal on the {310} plane is larger than the number of boron molecules comprising six boron atoms on the {310} plane.
Claims15
An electron beam apparatus having a cold field emission electron source characterized in that
- the emitter of the electron beam of the cold field emission electron source is Ce hexaboride or a hexaboride of a lanthanoid metal heavier than Ce,
- the hexaboride emits the electron beam from the {310} plane, and
- the number of the atoms of the lanthanoid metal on the {310} plane is larger than the number of boron molecules comprising six boron atoms on the {310} plane.
An electron beam apparatus having a cold field emission electron source characterized in that
- the emitter of the electron beam of the cold field emission electron source is Ce hexaboride or a hexaboride of a lanthanoid metal heavier than Ce, and
- the full width at half maximum of the energy distribution of the electron beam emitted from a plane including the {310} plane of the hexaboride is 0.27 eV or less.
An electron beam apparatus having a cold field emission electron source characterized in that
- the emitter of the electron beam of the cold field emission electron source is Ce hexaboride or a hexaboride of a lanthanoid metal heavier than Ce, and
- the ratio JΩ/It of the angular current density JΩ (μA/sr) of the electron beam emitted from a plane including the {310} plane of the hexaboride to the total current It (μA) emitted from the cold field emission electron source is six or more.
Dependencies are inferred from the claim text.