Temperature control device and auto-tuning method

A temperature control device that controls a temperature of a heated body of a heating system heating the heated body using a heating body in accordance with a control parameter, the temperature control device comprising:

• a target setting part that sets a target temperature and a target change rate of the temperature of the heated body with respect to time before the temperature of the heated body arrives at the target temperature;
• an upper limit value setting part that sets an upper limit value of an operation amount of the heating body;
• a heating processing part that operates the heating body at the upper limit value set by the upper limit value setting part such that the temperature of the heated body arrives at the target temperature;
• and
• a determination part that executes a determination process of determining whether or not a deviation amount representing a deviation between an actual measured temperature of the heated body and a temperature trajectory represented by the target change rate is outside a predetermined range for every predetermined time,
• wherein the upper limit value setting part sets an initial value set in advance as the upper limit value in a case in which the heating processing part starts an operation of the heating body toward the target temperature, and in a case in which the deviation amount is determined to be outside the predetermined range before the temperature of the heated body arrives at the target temperature, updates the upper limit value such that the deviation amount is decreased, the temperature control device further comprises:
• a parameter setting part that sets the upper limit value set by the upper limit value setting part when the temperature of the heated body arrives at the target temperature as the control parameter.