Pressure control device

A pressure control device which maintains a pressure within a target of pressure control at a set pressure, the pressure control device comprising:

• a correction circuit that corrects a pressure signal, which represents the pressure within the target of pressure control that is detected by a pressure sensor, such that the pressure signal approaches a set pressure signal representing the set pressure;
• a comparison circuit that compares the corrected pressure signal with the set pressure signal;
• and
• a valve drive circuit that controls an opening and closing of a flow control valve based on a comparison result from the comparison circuit,
• wherein the correction circuit is a filter circuit, the frequency characteristic of the filter circuit having a peak at a prescribed frequency, and correcting the pressure signal so as to raise a component of the prescribed frequency of the pressure signal,
• wherein the prescribed frequency is determined based on a relationship between the flow rate of a gas flowing through a pipe and a volume of the target of the pressure control and/or based on a length of the pipe between the target of the pressure control and the pressure control device.