Control method of movable body, exposure method, device manufacturing method, movable body apparatus, and exposure apparatus

A movable body apparatus, comprising:

• a movable body which is movable within a two-dimensional plane including a first axis and a second axis intersecting the first axis, and on which an object is placed;
• a mark detection system that is capable of scanning a measurement beam in a direction of the first axis, with respect to a mark of the object placed on the movable body, and capable of receiving a beam from the mark;
• and
• a control system that performs detection of the mark of the object using the mark detection system, wherein the control system:
• scans the measurement beam in the direction of the first axis from the mark detection system with respect to the mark of the object while moving the movable body in the direction of the first axis;
• detects the mark and measures a positional relationship between the mark and the measurement beam, based on a result of receiving the beam from the mark by the mark detection system, and
• performs adjustment of a relative position between the movable body and the measurement beam based on the positional relationship that has been measured.