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US 10,520,838 B2Granted
Mounting arrangement for an optical imaging arrangement
AssigneeCarl Zeiss SMT GmbH
InventorsDirk Schaffer, Jens Prochnau
Life of this patent
Estimating the term…
Abstract
A connection arrangement for connecting an optical component of an optical imaging arrangement to a support unit of a support structure includes: a connecting element unit having a support interface end with support interface section; and a component interface end with a component interface section.
Claims20
An arrangement configured to connect an optical component to a support unit of a support structure, the arrangement comprising:
- a connecting element unit having a support interface end with a support interface section and a component interface end with a component interface section,
- wherein:
- the support interface section is configured to form a support interface to mechanically connect to the support unit;
- the component interface section is configured to provide a component interface for mechanical connection to the optical component;
- the connecting element unit defines a force flow path between the support interface section and the component interface section so that, when the optical component is supported by the support unit via the connecting element unit, support forces supporting the optical component flow along the force flow path;
- at least one parasitic load compensation unit is located in a vicinity of the component interface section and external to the force flow path;
- and
- the parasitic load compensation unit is configured to reduce and/or counteract thermal expansion induced parasitic loads introduced in at least one parasitic load direction into the optical component as a result of thermal expansion of the connecting element unit in the at least one parasitic load direction.
5 more elements
A method of connecting an optical component to a support unit of a support structure, the method comprising:
- providing a connecting element unit, which has a support interface end with support interface section and a component interface end with a component interface section, wherein the connecting element unit defines a force flow path between the support interface section and the component interface section;
- and
- mechanically connecting a support interface of the support interface section to the support unit and mechanically connecting a component interface of the component interface section to the optical component, such that support forces supporting the optical component flow along the force flow path,
- wherein:
- at least one parasitic load compensation unit is located in a vicinity of the component interface section and external to the force flow path;
- and
- the parasitic load compensation unit reduces and/or counteracts thermal expansion induced parasitic loads introduced in at least one parasitic load direction into the optical component as a result of thermal expansion of the connecting element unit in the at least one parasitic load direction.
4 more elements
Dependencies are inferred from the claim text.